Analysis of the properties of radio frequency ion plated Cu films based on the calculation of the ion energy available per film atom.

Autor: Khandagle, M. J., Gangal, S. A., Karekar, R. N.

Publikováno v: Journal of Applied Physics; 11/15/1993, Vol. 74 Issue 10, p6150, 8p, 1 Black and White Photograph, 1 Diagram, 1 Chart, 5 Graphs