Zobrazeno 1 - 10
of 23
pro vyhledávání: '"Keyvani Janbahan, A."'
Autor:
Mobki, Hamed, Sadeghi, Morteza H., Rezazadeh, Ghader, Fathalilou, Mohammad, keyvani-janbahan, Ali-asghar
Publikováno v:
In Applied Mathematical Modelling 1 March 2014 38(5-6):1881-1895
Autor:
Xiaosong Yang, Hai Zhang, Dekun Huang, Yimin Wu, Yifan Gu, Junyi Bao, Xue Gong, Lei Jiang, Jiaqi Wu, Aliasghar Keyvani Janbahan, Jun Li, Yiping Zhao, Hua Li
Publikováno v:
2021 International Workshop on Advanced Patterning Solutions (IWAPS).
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::14b983d1d579e464b6f1ffb1c05ea97b
https://doi.org/10.1109/iwaps54037.2021.9671064
https://doi.org/10.1109/iwaps54037.2021.9671064
Autor:
Keyvani Janbahan, A., Veen, G. van der, Tamer, M.S., Sadeghian Marnani, H., Goosen, H., Keulen, F. van
Publikováno v:
IEEE Transactions on Nanotechnology, 19, 274-283
The real-time and accurate measurement of tip-sample interaction forces in Tapping Mode Atomic Force Microscopy (TM-AFM) is a remaining challenge. This obstruction fundamentally stems from the causality of the physical systems. Since the input of the
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=dedup_wf_001::19d45b28e20f3414d16e0d49252f8862
http://resolver.tudelft.nl/uuid:ef0a6ae2-a39a-49f1-b3d9-845ed0d1393a
http://resolver.tudelft.nl/uuid:ef0a6ae2-a39a-49f1-b3d9-845ed0d1393a
Autor:
Reijzen, M.E. van, Tamer, M.S., Es, M.H. van, Riel, M.C.J.M. van, Keyvani Janbahan, A., Sadeghian Marnani, S., Lans, M.J. van der
Publikováno v:
Proceedings Metrology, Inspection, and Process Control for Microlithography XXXII, 2018, San Jose, CA, USA
In this paper, we present an AFM based subsurface measurement technique that can be used for overlay and critical dimensions (CD) measurements through optically opaque layers. The proposed method uses the surface elasticity map to resolve the presenc
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=dedup_wf_001::9f53c01622db2cd3e108126678f58a63
http://resolver.tudelft.nl/uuid:b3312949-6ae3-467a-952e-b209dce3360f
http://resolver.tudelft.nl/uuid:b3312949-6ae3-467a-952e-b209dce3360f
Autor:
Reijzen, M.E. van, Tamer, M.S., Es, M.H. van, Riel, M.C.J.M. van, Duivenvoorde, T., Keyvani Janbahan, A., Sadeghian Marnani, S., Lans, M.J van der
In the semiconductor industry, the need for characterization of subsurface features of wafers on a sub-nanometer level becomes ever more important. With Scanning Subsurface Probe Microscopy (SSPM), the smallest features can be measured with high reso
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=dedup_wf_001::815f9f6803908e5dc1c29756de7eed22
http://resolver.tudelft.nl/uuid:fdb3a562-9074-4855-9542-e96198dd808e
http://resolver.tudelft.nl/uuid:fdb3a562-9074-4855-9542-e96198dd808e
Publikováno v:
SID Semicon Innovation Day, Science Centre Delft, 21 May 2019
Elasticity based Sub- surface Atomic Force Microscopy is a promising metrology solution for CD measurements, defect characterization and alignment and overlay applications.
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=dedup_wf_001::39618c62ec9a553c28bdf801b6b60045
http://resolver.tudelft.nl/uuid:fe79e9ef-58b5-4a81-aa6e-52885e564260
http://resolver.tudelft.nl/uuid:fe79e9ef-58b5-4a81-aa6e-52885e564260
Publikováno v:
Nonlinear Dynamics
Nonlinear Dynamics: an international journal of nonlinear dynamics and chaos in engineering systems, 97(2)
Nonlinear Dynamics: an international journal of nonlinear dynamics and chaos in engineering systems, 97(2)
Many investigations have focused on steady-state nonlinear dynamics of cantilevers in tapping mode atomic force microscopy (TM-AFM). However, a transient dynamic model—which is essential for a model-based control design—is still missing. In this
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::9017116fbdf6591915669984f717268c
http://resolver.tudelft.nl/uuid:0c6c7dbc-3c52-4a8f-8610-5d6fe0f5a5bc
http://resolver.tudelft.nl/uuid:0c6c7dbc-3c52-4a8f-8610-5d6fe0f5a5bc
Autor:
Keyvani Janbahan, A.
The technique of Atomic Force Microscopy (AFM) is one of the major inventions of the twentieth century which substantially contributed to our understanding of the nanoscale world. In contrast to other microscopy techniques, the AFM does not operate b
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::1960f4a711908c106003fac98725bc50
Autor:
Farbod Alijani, A. Keyvani Janbahan, H. Sadeghian Marnani, F. van Keulen, K. Maturova, Hans Goosen
Publikováno v:
Journal of Applied Physics, 122(22)
Journal of Applied Physics, 22, 122
Journal of Applied Physics, 122(22):224306. American Institute of Physics
Journal of Applied Physics, 22, 122
Journal of Applied Physics, 122(22):224306. American Institute of Physics
This paper investigates the closed-loop dynamics of the Tapping Mode Atomic Force Microscopy using a new mathematical model based on the averaging method in Cartesian coordinates. Experimental and numerical observations show that the emergence of cha
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::a3e8aabd193356732ddfcd06106c1e94
http://resolver.tudelft.nl/uuid:3a7fba78-86ec-4506-b3fe-c089c28b7c9c
http://resolver.tudelft.nl/uuid:3a7fba78-86ec-4506-b3fe-c089c28b7c9c
Autor:
Ali-asghar keyvani-janbahan, Morteza Sadeghi, Ghader Rezazadeh, Mohammad Fathalilou, Hamed Mobki
Publikováno v:
Applied Mathematical Modelling. 38:1881-1895
Size dependent behavior of materials arises for a structure when the characteristic size such as thickness or diameter is close to its internal length-scale parameter. In these cases, ignoring this behavior in modeling may leads to incorrect results.
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::e30c5daed5e65d08e06ab4eaa7c1e970
https://doi.org/10.1016/j.apm.2013.10.001
https://doi.org/10.1016/j.apm.2013.10.001