Zobrazeno 1 - 10
of 45
pro vyhledávání: '"Kevin W. Kelly"'
Publikováno v:
Journal of Micromechanics and Microengineering. 15:1249-1259
Ultra-tall (2–4 mm), densely packed arrays of high aspect ratio micro structures (HARMs) are required for a variety of heat transfer and mass transfer devices currently under development. Great success has been reported lithographically defining re
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::db17fcc1f37cd5857343e46fa20e5b44
https://doi.org/10.1088/0960-1317/15/6/016
https://doi.org/10.1088/0960-1317/15/6/016
Publikováno v:
Journal of Micromechanics and Microengineering. 15:1242-1248
Although the benefits of SU-8 as a thick photoresist material for MEMS applications have been shown by various researchers, its use for ultra-thick applications (>1 mm) has been hampered by the difficulties associated with the high solvent gradient o
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::2bc579e7c0e02fc24903375e541b8a8f
https://doi.org/10.1088/0960-1317/15/6/015
https://doi.org/10.1088/0960-1317/15/6/015
Autor:
Tao Wang, Kevin W. Kelly, D. Hensley, R.M. Lienau, A. McCandless, Zhong-geng Ling, Yohannes M. Desta
Publikováno v:
Journal of Microelectromechanical Systems. 14:400-409
This paper describes a process to fabricate monolithic multilevel high-aspect-ratio microstructures (HARMs) for ferromagnetic devices built on silicon wafers using aligned X-ray lithography in conjunction with electrodeposition. Two X-ray masks were
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::00976d3306a279d5fe4560248e66ca40
https://doi.org/10.1109/jmems.2004.839339
https://doi.org/10.1109/jmems.2004.839339
Autor:
Tao Wang, Kevin W. Kelly
Publikováno v:
Journal of Micromechanics and Microengineering. 15:81-90
The LIGA micromachining process can be used to fabricate high-aspect-ratio microstructures (HARMs), usually from electroplated nickel (Ni). In recent years, there has been a growing demand for applications involving HARMs subjected to harsh environme
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::d71af7ff702b7db6c2a20a777a84f226
https://doi.org/10.1088/0960-1317/15/1/013
https://doi.org/10.1088/0960-1317/15/1/013
Autor:
Kevin W. Kelly, Christophe Marques
Publikováno v:
Journal of Heat Transfer. 126:434-444
Nickel micro pin fin heat exchangers can be electroplated directly onto planar or non-planar metal surfaces using a derivative of the LIGA micromachining process. These heat exchangers offer the potential to more effectively control the temperature o
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::e92c98fb3e7e0d8bd7f22efae12d7b6e
https://doi.org/10.1115/1.1731341
https://doi.org/10.1115/1.1731341
Publikováno v:
Microsystem Technologies. 10:323-328
Compression molding of Pb plates with LiGA (Lithographie, Galvanoformung, Abformung) fabricated Ni microscale mold inserts was carried out in the temperature range of 100–300 °C. In-situ measurements of compressive molding force, demolding frictio
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::9d3d69cc833c6d6d74cddad78769af15
https://doi.org/10.1007/s00542-003-0333-8
https://doi.org/10.1007/s00542-003-0333-8
Publikováno v:
Microsystem Technologies. 9:559-566
Molding of Pb and Zn metal plates with LiGA (Lithographie, Galvanoformung, Abformung) fabricated Ni microscale mold inserts was carried out at 300 °C. Both as fabricated Ni inserts and Ni inserts conformally coated with Ti-containing hydrocarbon (Ti
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::7f8cfb1beac25ae053dca7a15e780ad3
https://doi.org/10.1007/s00542-003-0308-9
https://doi.org/10.1007/s00542-003-0308-9
Autor:
Kevin W. Kelly, Derrick C. Mancini, Yohannes M. Desta, Emil J. Geiger, Ryan A. Turner, Steve Cortez, Jian Zhang
Publikováno v:
Journal of Micromechanics and Microengineering. 13:367-372
The standard LIGA process takes advantage of the use of x-ray lithography to produce mold inserts with nearly vertical sidewall; the typical slope of patterns produced by x-ray lithography of polymethylmethacrylate is 0.1%. This lack of significant t
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::1f76277f2ae1a96515879446c40cf4cf
https://doi.org/10.1088/0960-1317/13/3/303
https://doi.org/10.1088/0960-1317/13/3/303
Publikováno v:
Journal of Microelectromechanical Systems. 11:726-735
Planar micro-cross-flow heat exchangers, similar in concept to most automobile radiators, have been fabricated using two different processes. A process that was previously reported (Harris et al., 2000) to fabricate a polymer heat exchanger involved
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::b0de2ef0c23b88a527f5f93dccdee852
https://doi.org/10.1109/jmems.2002.806025
https://doi.org/10.1109/jmems.2002.806025
Publikováno v:
Thin Solid Films. :553-559
Methods to engineer the surfaces of micro-electro-mechanical systems (MEMS) are just beginning to be explored. Coating deposition is one such method. In cases where microdevices involve moving parts in contact, such as gear sets, combustion chambers,
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::edeb8b80cd4d8d0ca73fa509afbf33fd
https://doi.org/10.1016/s0040-6090(01)01317-7
https://doi.org/10.1016/s0040-6090(01)01317-7