Plasma-enhanced atomic layer deposition: Correlating O2 plasma parameters and species to blister formation and conformal film growth

Autor: Diederik Depla, Kevin Van de Kerckhove, Philippe Smet, Christophe Detavernier, Jolien Dendooven, Andreas Werbrouck, Dirk Poelman

Publikováno v: JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A

Plasma-enhanced atomic layer deposition has gained a lot of attraction over the past few years. A myriad of processes have been reported, several reviews have been written on this topic, and there is a lot of interest for industrial applications. Sti

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::0382bfa23769ba8b86ba0c03d710558a
https://doi.org/10.1116/6.0001094

Low-temperature molecular layer deposition using monifunctional aromatic precursors and ozone-based ring-opening reactions

Autor: Maarit Karppinen, Timo Sajavaara, Laura Svärd, Pekka Simell, Matti Putkonen, Eija Kenttä, Kevin Van de Kerckhove, Fabian Krahl, Christophe Detavernier

Publikováno v: Svärd, L, Putkonen, M, Kenttä, E, Sajavaara, T, Krahl, F, Karppinen, M, Van de Kerckhove, K, Detavernier, C & Simell, P 2017, ' Low-temperature molecular layer deposition using monifunctional aromatic precursors and ozone-based ring-opening reactions ', Langmuir, vol. 33, no. 38, pp. 9657-9665 . https://doi.org/10.1021/acs.langmuir.7b02456

Molecular layer deposition (MLD) is an increasingly used deposition technique for producing thin coatings consisting of purely organic or hybrid inorganic-organic materials. When organic materials are prepared, low deposition temperatures are often r

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::dbd8cf5524560858ebfc2ad712687a26
https://cris.vtt.fi/en/publications/3f6190a4-2332-4db5-9c0a-0f2e029c137e

Molecular layer deposition of 'vanadicone', a vanadium-based hybrid material, as an electrode for lithium-ion batteries

Autor: Kevin Van de Kerckhove, Felix Mattelaer, Jolien Dendooven, Christophe Detavernier

Publikováno v: Dalton Transactions. 46:4542-4553

Molecular layer deposition (MLD) of hybrid organic-inorganic thin films called "vanadicones" was investigated using tetrakisethylmethylaminovanadium (TEMAV) as the metal precursor and glycerol (GL) or ethylene glycol (EG) as the organic reactant. Lin

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::7977c6ada47c58fe28e12ffb5f115ebb
https://doi.org/10.1039/c7dt00374a

Annealing of thin 'Tincone' films, a tin-based hybrid material deposited by molecular layer deposition, in reducing, inert, and oxidizing atmospheres

Autor: Christophe Detavernier, Jolien Dendooven, Kevin Van de Kerckhove

Publikováno v: JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A

Molecular layer deposition of hybrid organic-inorganic thin films called "tincones" is achieved using tetrakisdimethylaminotin as the metal precursor and glycerol (GL) as the organic reactant. The GL-based process displays linear growth and self-limi

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::54674f1a6d2efbbe45cb0b1d556026df
https://hdl.handle.net/1854/LU-8609299

Correction: Key role of surface oxidation and reduction processes in the coarsening of Pt nanoparticles

Autor: Thomas Dobbelaere, Ranjith Karuparambil Ramachandran, Eduardo Solano, Jolien Dendooven, Daniel Hermida-Merino, Matthias Minjauw, Christophe Detavernier, Kevin Van de Kerckhove

Publikováno v: Nanoscale. 9(45)

Correction for ‘Key role of surface oxidation and reduction processes in the coarsening of Pt nanoparticles’ by Eduardo Solano et al., Nanoscale, 2017, 9, 13159–13170.

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::8462517af34f77229a3ab114c5e18a24
https://pubmed.ncbi.nlm.nih.gov/28850144