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Autor:
Dan Cogut, Matthias Hanisch, Jeff Hanan, Andreas Weber, Robert Sinn, Gaurav Gupta, Andrew Lu, Gary Green, Kevin Drinkwine
Publikováno v:
25th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC 2014).
As the business landscape becomes more complex, high tech companies will invariably need to significantly improve their factory systems or replace them completely. The success, speed, and cost to convert the factory's systems depend on key factors su
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::104122eb7328a7f961745f1dec107136
https://doi.org/10.1109/asmc.2014.6847024
https://doi.org/10.1109/asmc.2014.6847024
