Zobrazeno 1 - 3
of 3
pro vyhledávání: '"Kerstin Woerhoff"'
Publikováno v:
SPIE Proceedings.
As a novel application of silicon-based integrated optics, the results of a compact Mach-Zehnder interferometer are presented. The deposition of a ZnO thin-film transducer on the reference arm of the interferometer transforms this optically passive d
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::0be6988000b95c9082d9b241c3863d6d
https://doi.org/10.1117/12.311037
https://doi.org/10.1117/12.311037
Autor:
Kerstin Woerhoff, Paul V. Lambeck, H. Albers, Oscar Noordman, Niko F. van Hulst, Th. J. A. Popma
Publikováno v:
SPIE Proceedings.
The thickness non-uniformity and refractive index in- homogeneity of silicon oxynitride thin films, grown by low pressure chemical vapor deposition, have been optimized. The present work was especially motivated by the application of these thin films
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::21eb413b04d032d9d3764496a5c5f2fb
https://doi.org/10.1117/12.281235
https://doi.org/10.1117/12.281235
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