Výsledky vyhledávání - "Kenton David Childs"

Comparison of submicron particle analysis by Auger electron spectroscopy, time‐of‐flight secondary ion mass spectrometry, and secondary electron microscopy with energy dispersive x‐ray spectroscopy

Autor: Alain C. Diebold, Lori A. LaVanier, Patricia M. Lindley, David Narum, George Mulholland, Bruno W. Schueler, Kenton David Childs

Publikováno v: Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. 14:2392-2404

Particulate contamination can result in a significant yield loss during semiconductor device fabrication. As device design rule dimensions decrease the critical defect size also decreases, resulting in the need to analyze smaller defects. Current man

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::a0f3e6abbed0bc6b51b39f4ca8f1a355
https://doi.org/10.1116/1.580027

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