Zobrazeno 1 - 10
of 10
pro vyhledávání: '"Kentaro Utsumi"'
Publikováno v:
Journal of Applied Physics; 2014, Vol. 115 Issue 13, p133505-1-133505-9, 9p, 1 Color Photograph, 2 Black and White Photographs, 2 Diagrams, 2 Charts, 6 Graphs
Autor:
Kentaro Utsumi, Koki Yano, Norihiro Ito, Tomoko Sasabayashi, Kazuyoshi Inoue, Yuzo Shigesato, Yasushi Sato, Eriko Nishimura, Akira Kaijo
Publikováno v:
Japanese Journal of Applied Physics. 46:7806-7811
Representative transparent conductive oxide films, such as tin-doped indium oxide (ITO) and indium–zinc oxide (IZO) films, were deposited by dc magnetron sputtering using corresponding oxide targets under various total gas pressures (Ptot) ranging
Autor:
Hitoshi Iigusa, Yasushi Sato, Eriko Nishimura, Yuzo Shigesato, Kentaro Utsumi, Pung-keug Song, Ryo Tokumaru
Publikováno v:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. 23:1167-1172
Transparent conductive In2O3–SnO2 films were deposited by dc magnetron sputtering on unheated glass substrates using high-density ceramic targets with various SnO2 concentrations (0–100 wt. %). These films were subsequently postannealed in variou
Autor:
T. Sasabayashi, Masato Kon, E Nishimura, Pung Keun Song, A. Kaijo, Kentaro Utsumi, Norihiro Ito, Yuzo Shigesato
Publikováno v:
Thin Solid Films. 445:219-223
Mechanical properties such as internal stress or adhesion of transparent conductive oxide (TCO) films are important in order to guarantee the patterning accuracy and durability for various types of commercial applications. Representative TCO films, s
Publikováno v:
Thin Solid Films. 445:229-234
The influence of SnO 2 concentration in the target on the film characteristics was studied in order to make the useful database for the device design when low discharge voltage sputtering method and a high density In 2 O 3 -SnO 2 ceramic targets were
Publikováno v:
Thin Solid Films. 334:30-34
The ultra high density ITO target of 99% or more in relative density has developed by the improvements of the ITO powder and the sintering process. Sputtering test on various densities (90, 97 and 99%) of ITO (SnO2: 10 wt.%) targets was performed in
Autor:
Makoto Konagai, Hideto Kuramochi, Porponth Sichanugrist, Tetsuo Shibutami, Aswin Hongsingthong, Akehiro Aino, Kentaro Utsumi, Ryo Akiike, Hitoshi Iigusa
Publikováno v:
Japanese Journal of Applied Physics. 51
We have successfully developed novel aluminum-doped zinc oxide (AZO-X) films with a high haze ratio by the combined use of an etched glass substrate and wet-etched AZO-X films. The effects of the use of an etched glass substrate and wet-chemical etch
Autor:
Kentaro Utsumi, Makoto Konagai, Hitoshi Iigusa, Ryo Akiike, Porponth Sichanugrist, Tetsuo Shibutami, Hideto Kuramochi
Publikováno v:
2011 37th IEEE Photovoltaic Specialists Conference.
We have developed novel Al doped zinc oxide (AZO) films, AZO-X films, using d.c. magnetron sputtering process and have investigated their electro-optical properties and their surface morphology. AZO-X films showed a good balance between the transmitt
Publikováno v:
Journal of Applied Physics. 73:6680-6682
Magnetic properties and crystal structure of sputtered CoCrTaPt/Cr and CoCrTa/Cr thin films were studied as a function of Pt content and the substrate temperature. It was observed that the coercivity increased with Pt content or the substrate tempera
Publikováno v:
Journal of Applied Physics. 115:133505
Spectroscopic ellipsometry (SE) has been applied to study the effects of grain boundary, humidity, and surface texture on the carrier transport properties of Al-doped ZnO layers fabricated by dc and rf magnetron sputtering. In the SE analysis, the va