Výsledky vyhledávání - "Kenta Tamaru"

Exposure characteristics of ternary copolymerization positive tone electron beam resist containing p-chloro-α-methylstyrene

Autor: Minako Iwakuma, Ryoichi Hoshino, Yukiko Kishimura, Shunsuke Ochiai, Kenta Tamaru, Hironori Asada

Publikováno v: Photomask Japan 2018: XXV Symposium on Photomask and Next-Generation Lithography Mask Technology.

p-Chloro-α-methylstyrene (PCMS) has the chemical structure as the chlorine atom is introduced in phenyl group of α- methylstyrene (MS). In the present study, we synthesized a ternary copolymer consisted with methyl-α-chloroacrylate (ACM), PCMS and

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::cdad2a25ef4de5116c06d5df1b719568
https://doi.org/10.1117/12.2324709

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Exposure characteristics of ternary copolymerization positive tone electron beam resist containing p-chloro-a-methylstyrene.

Autor: Kenta Tamaru, Shunsuke Ochiai, Yukiko Kishimura, Hironori Asada, Ryoichi Hoshino, Minako Iwakuma

Publikováno v: Proceedings of SPIE; 8/23/2018, Vol. 10807, p1-5, 5p

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