Výsledky vyhledávání - "Kenta Setaka"

Quantitative evaluation of high-energy O−ion particle flux in a DC magnetron sputter plasma with an indium-tin-oxide target

Autor: Hansin Bae, Hirotaka Toyoda, Hayato Ogawa, Taku Suyama, Kenta Setaka, Haruka Suzuki, Yushi Fukuoka

Publikováno v: Journal of Physics D: Applied Physics. 50:445201

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::3f4843db92e5f970e620380d8631a7af
https://doi.org/10.1088/1361-6463/aa87a1

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Akademický článek

Quantitative evaluation of high-energy O− ion particle flux in a DC magnetron sputter plasma with an indium-tin-oxide target.

Autor: Taku Suyama, Hansin Bae, Kenta Setaka, Hayato Ogawa, Yushi Fukuoka, Haruka Suzuki, Hirotaka Toyoda

Publikováno v: Journal of Physics D: Applied Physics; 11/8/2017, Vol. 50 Issue 44, p1-1, 1p

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