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pro vyhledávání: '"Kenny Ong Yong Keng"'
Publikováno v:
Opto-Electronic Advances, Vol 1, Iss 8, Pp 180014-1-180014-6 (2018)
A novel spatial double-pulse laser ablation scheme is investigated to enhance the processing quality and efficiency for nanosecond laser ablation of silicon substrate. During the double-pulse laser ablation, two splitted laser beams simultaneously ir