Zobrazeno 1 - 9
of 9
pro vyhledávání: '"Kenneth Torres"'
Autor:
S. Borthakur, Husam N. Alshareef, R. Bergmann, L. Larson, A. Hou, D.J. Derro, A. Agarwal, Howard R. Huff, F. Shaapur, Robert W. Murto, George A. Brown, Billy Nguyen, Mark Gardner, P. Lysaght, Chris M. Sparks, Gennadi Bersuker, Deborah J. Riley, Loyd Perrymore, C. Lim, Kenneth Torres, Peter Zeitzoff, M. Freiler, S. Lim, Y. Kim, G. Gebara, Brendan Foran, Chadwin D. Young, J.E. Lim, M.D. Jackson, B. Bowers, J. Gutt, Joel Barnett, P.J. Chen
Publikováno v:
Extended Abstracts of International Workshop on Gate Insulator. IWGI 2001 (IEEE Cat. No.01EX537).
We review several gate stack fabrication issues critical for robust, commercially viable tools, including assessment of possible fab contamination due to the higher-k gate dielectrics and the role of subsequent thermal procedures during, for example,
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::1993d901660b8c2c543da639dd6375a5
https://doi.org/10.1109/iwgi.2001.967538
https://doi.org/10.1109/iwgi.2001.967538
Autor:
Swaroop Ganguly, Taras A. Kirichenko, Hong-Jyh Li, Peter Zeitzoff, Sanjay K. Banerjee, Kenneth Torres, P. Kohli
Publikováno v:
International Electron Devices Meeting 2000. Technical Digest. IEDM (Cat. No.00CH37138).
Modeling and experimental investigation of B equilibrium diffusivity and its activation in Si in the presence of other species, including ab initio calculations, are presented here. The results suggest that incorporating other species along with B in
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::e1923b51112663a8dc03162d7df64b23
https://doi.org/10.1109/iedm.2000.904368
https://doi.org/10.1109/iedm.2000.904368
Autor:
G. Williamson, P. Lysaght, Peter Zeitzoff, Billy Nguyen, S. Kim, Kenneth Torres, V.H.C. Watt, J. A. Fair, G. Gale, M.D. Jackson, M. C. Gilmer, T. Y. Luo, George A. Brown, Carolyn F. H. Gondran, M. T. Schulberg, T. Tamagawa, Gennadi Bersuker, R. Amos, Howard R. Huff, D. Brady, Franz T. Geyling, J. Guan, L. Vishnubhotla
Publikováno v:
MRS Proceedings. 567
A design-of-experiments methodology was implemented to assess the commercial equipment viability to fabricate the high-K dielectrics Ta2O5, TiO2 and BST (70/30 and 50/50 compositions) for use as gate dielectrics. The high-K dielectrics were annealed
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::0e0a21e1ee9f5cd28e4f9fbe0838ad4d
https://doi.org/10.1557/proc-567-323
https://doi.org/10.1557/proc-567-323
Autor:
Howard R. Huff, F. Shaapur, Kenneth Torres, Alain C. Diebold, A. Karamcheti, Peter Zeitzoff, X. Guo, L. Vishnubhotla, V.H.C. Watt, Gennadi Bersuker, T. Tamagawa, J. Guan, Xiaomu Wang, D. Brady, M.D. Jackson, George A. Brown, T. Y. Luo, Tso-Ping Ma, M. C. Gilmer, G. Gale
Publikováno v:
MRS Proceedings. 592
This paper describes the electrical and physical characteristics of ultrathin Jet Vapor Deposited (JVD) Silicon Oxynitride films. Capacitance-Voltage measurements indicate an equivalent oxide thickness (EOT) of less than 2 nm, taking into account the
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::022a80a5bdcaebde1885916b3f31a4d8
https://doi.org/10.1557/proc-592-307
https://doi.org/10.1557/proc-592-307
Publikováno v:
MRS Proceedings. 470
This paper summarizes a Joint Development Project between SEMITOOL, member company and SEMATECH to demonstrate and develop the fast ramp vertical furnace. The goal of this project was to deliver a production vertical furnace capable of heating and co
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::929bd6bf9491ab6040d0867d3c0ad9db
https://doi.org/10.1557/proc-470-193
https://doi.org/10.1557/proc-470-193
Autor:
Arthur H. Howell, Norman A. Preble, Earl L. Poole, Donald M. Hatfield, William H. Gates, H. R. Gregg, Aldo Leopold, Allan Brooks, Franklin H. May, J. Kenneth Torres, Lyndon L. Hargrave, G. Willett, Claude W. Hibbard, H. L. Whitaker, W. Robert Eadie, D. G. Nichols, Arnold J. Nicholson, Vernon Bailey, Earl E. Hoover, Robert T. Hatt, Merlin K. Potts, Horace Elmer Wood, Thomas Barbour
Publikováno v:
Journal of Mammalogy. 18:95
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::6430d9e6a23a494d70c416fd82956cf3
https://doi.org/10.2307/1374321
https://doi.org/10.2307/1374321
Autor:
J. Kenneth Torres
Publikováno v:
Journal of Mammalogy. 18:100-100
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::20f71824b5163adfec742cd7554be836
https://doi.org/10.1093/jmammal/18.1.100
https://doi.org/10.1093/jmammal/18.1.100
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Conference
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