Zobrazeno 1 - 3
of 3
pro vyhledávání: '"Kenneth J. McCullough"'
Autor:
B.N. Rhoads, G. Stojakovic, D.D. Miura, F. Schnabel, David L. Rath, Jeffrey P. Gambino, Ronald G. Filippi, Edward W. Kiewra, R.V.S.S.N. Ravikumar, Kenneth J. McCullough, D.J. Delehanty
Publikováno v:
Solid State Phenomena. :51-54
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::3c85df0cbd18a277a8fc08ebd043251e
https://doi.org/10.4028/www.scientific.net/ssp.76-77.51
https://doi.org/10.4028/www.scientific.net/ssp.76-77.51
Autor:
Kenneth J. McCullough, E.W. Kiewra, D.D. Miura, B.N. Rhoads, G. Stojakovic, R.V.S.S.N. Ravikumar, Ronald G. Filippi, David L. Rath, D.J. Delehanty
Publikováno v:
Solid State Phenomena. :31-34
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::9c73d459ec13e65e5afb5fc7b5805c51
https://doi.org/10.4028/www.scientific.net/ssp.76-77.31
https://doi.org/10.4028/www.scientific.net/ssp.76-77.31
Autor:
Bum Ki Moon, Satya V. Nitta, M. Zaitz, Junjun Liu, Steve Cohen, Derren N. Dunn, Cathy Labelle, Yushan Yan, Hong Lin, Nicholas C. M. Fuller, Griselda Bonilla, Kelly Malone, Zijian Li, Muthumanickam Sankarapandian, Andrew H. Simon, Shuang Li, N. Klymko, Kenneth J. McCullough, E. Todd Ryan, Paul S. Ho, Charles J. Taft, Eva E. Simonyi
Publikováno v:
MRS Proceedings. 863
Future microprocessor technologies will require interlayer dielectric (ILD) materials with a dielectric constant (κ-value) less than 2.5. Organosilicate glass (OSG) materials must be nanoporous to meet this demand. However, the introduction of nanop
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::17e7f2b256850e5adf1ee117b9292d80
https://doi.org/10.1557/proc-863-b2.1
https://doi.org/10.1557/proc-863-b2.1