Výsledky vyhledávání - "Kenkichi Nishimura"

Silicon nanowire growth on Si and SiO2substrates by rf magnetron sputtering in Ar/H2

Autor: Yoshinori Takao, Yutaro Hirano, Kouichi Ono, Ikumi Yamada, Kenkichi Nishimura, Koji Eriguchi

Publikováno v: Applied Physics Express. 8:066201

Silicon nanowires (SiNWs) have been grown on Si(100) substrates with and without a thermal oxide layer by rf magnetron sputtering of Si in Ar/H2. In the experiments, thin Au layers were employed as catalysts, resulting in a significant and substantia

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::d6d2d3bb1b712f47110201268334b8c4
https://doi.org/10.7567/apex.8.066201

Zobrazit plný text záznamu

Akademický článek

Silicon nanowire growth on Si and SiO2 substrates by rf magnetron sputtering in Ar/H2.

Autor: Ikumi Yamada, Yutaro Hirano, Kenkichi Nishimura, Yoshinori Takao, Koji Eriguchi, Kouichi Ono

Publikováno v: Applied Physics Express; Jun2015, Vol. 8 Issue 6, p1-1, 1p

Zobrazit plný text záznamu

Vyhledávací nástroje:

Upřesnit hledání