Zobrazeno 1 - 10
of 29
pro vyhledávání: '"Kenji Yamazoe"'
Autor:
Chris A. Mack, Kenji Yamazoe
Publikováno v:
Journal of Micro/Nanolithography, MEMS, and MOEMS. 18:1
This editorial introduces a translation of a classic paper on the matrix theory of partially coherent imaging.
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::1042beced4314203d62e84e8930c9d46
https://doi.org/10.1117/1.jmm.18.2.020101
https://doi.org/10.1117/1.jmm.18.2.020101
Autor:
Kenji Yamazoe
Publikováno v:
Journal of the Optical Society of America. A, Optics, image science, and vision. 29(8)
This paper defines a matrix from which coherence property of imaging by partially coherent Koehler illumination is determined. The matrix termed coherency matrix in imaging system is derived by the space average of a product of a column vector and it
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::bec1773422adc3f0a695035dc19f6e4b
https://pubmed.ncbi.nlm.nih.gov/23201867
https://pubmed.ncbi.nlm.nih.gov/23201867
Autor:
Andrew R. Neureuther, Kenji Yamazoe
Publikováno v:
Applied optics. 50(20)
Aerial image through focus in the presence of aberrations and electromagnetic edge effects modeled by adding ±π/2 phase at pattern edges is expanded by a quadratic equation with respect to focus. The quadratic equation is expressed by four coeffici
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::4ef394b817dd2cb6f736b8aeceb5cbfe
https://pubmed.ncbi.nlm.nih.gov/21743568
https://pubmed.ncbi.nlm.nih.gov/21743568
Autor:
Abde Kaqalwalla, Nuo Xu, Lynn T.-N. Wang, Puneet Gupta, Costas J. Spanos, Tiehui Liu, Tuck-Boon Chan, Kwangok Jeong, Kameshwar Poolla, Kenji Yamazoe, Anand Subramanian, Xin Sun, Justin Ghan, Marshal A. Miller, Andrew R. Neureuther, Kun Qian, Eric Y. Chin, Cooper S. Levy, Rani S. Ghaida, Juliet Rubinstein
Publikováno v:
SPIE Proceedings.
Techniques for identifying and mitigating effects of process variation on the electrical performance of integrated circuits are described. These results are from multi-discipline, collaborative university-industry research and emphasize anticipating
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::81967e29b61c1e8cd2b8d48d38b7bffa
https://doi.org/10.1117/12.899394
https://doi.org/10.1117/12.899394
Publikováno v:
SPIE Proceedings.
We present an improved method of phase retrieval from through-focus image series with higher precision and reduced sensitivity to noise. The previous method, developed for EUV, actinic mask measurements, was based on the Gerchberg-Saxton algorithm an
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::4ecf57b8bbfd919c432012b095d9a6c1
https://doi.org/10.1117/12.881652
https://doi.org/10.1117/12.881652
Autor:
Andrew R. Neureuther, Kenji Yamazoe
Publikováno v:
Journal of the Optical Society of America. A, Optics, image science, and vision. 28(3)
This paper describes the Shannon entropy in a partially coherent imaging system with Koehler illumination. Numerical simulation shows that the entropy has a one-to-one relationship with the normalized mutual intensity given by the van Cittert–Zerni
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::2bf1f9640a04ee7ded625215d0bcabee
https://pubmed.ncbi.nlm.nih.gov/21383828
https://pubmed.ncbi.nlm.nih.gov/21383828
Autor:
Andrew R. Neureuther, Kenji Yamazoe
Publikováno v:
Journal of the Optical Society of America. A, Optics, image science, and vision. 27(9)
This paper presents a method for evaluating the image interaction of two object patterns of arbitrary shape in partially coherent imaging. The interaction is shown to be the interference of the eigenfunctions of the transmission cross coefficient at
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::1f75b6b1767183df801e95619a9479bd
https://pubmed.ncbi.nlm.nih.gov/20808398
https://pubmed.ncbi.nlm.nih.gov/20808398
Autor:
Kenji Yamazoe
Publikováno v:
Journal of the Optical Society of America. A, Optics, image science, and vision. 27(6)
This paper physically compares two different matrix representations of partially coherent imaging with the introduction of matrices E and Z, containing the source, object, and pupil. The matrix E is obtained by extending the Hopkins transmission cros
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::07af10fcdd7b7a68e5f24b9a4a10fb72
https://pubmed.ncbi.nlm.nih.gov/20508699
https://pubmed.ncbi.nlm.nih.gov/20508699
Autor:
Andrew R. Neureuther, Kenji Yamazoe
Publikováno v:
SPIE Proceedings.
Partially coherent imaging is formulated using two positive semi-definite matrices that include the mask as well as the source and pupil. One matrix E is obtained by shifting the pupil function as in Hopkins transmission cross coefficient (TCC) appro
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::709e716ca0d196832dff5418e702381b
https://doi.org/10.1117/12.846666
https://doi.org/10.1117/12.846666
Publikováno v:
SPIE Proceedings.
This paper presents kernel convolution with pattern matching (KCPM), which is an updated version of fast-CADpattern matching for assessing lithography process variations. With KCPM, kernels that capture lateral featureinteraction between features due
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::ce881eb84a2268eecd2393934c7cda18
https://doi.org/10.1117/12.846630
https://doi.org/10.1117/12.846630