Zobrazeno 1 - 10
of 11
pro vyhledávání: '"Kenichi Kidokoro"'
Publikováno v:
IEEE Transactions on Dielectrics and Electrical Insulation. 22:3663-3667
Charging efficiencies and heat resistance of three types of silicon dioxide/silicon nitride double-layer electrets were investigated. These electrets were fabricated with SiO2 films deposited from SiH4 via plasma-enhanced chemical vapor deposition (P
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::c428769f2484864e566025bcabf8f18f
https://doi.org/10.1109/tdei.2015.004918
https://doi.org/10.1109/tdei.2015.004918
Autor:
Ayako Yamada, Kenichi Kidokoro, Toshifumi Tajima, Yoshinobu Yasuno, Yoshinori Iguchi, Taira Itoh, Yasuo Nojima
Publikováno v:
IEEE Transactions on Dielectrics and Electrical Insulation. 22:3658-3662
Silicon Electret Condenser Microphones (Si-ECMs) are being studied to achieve small size, high performance, and reliability using Micro Electro Mechanical System (MEMS) technology. Increased robustness and stability are important to ensure wider use.
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::41cdd18fc2fe75c30a4b2b7975502bd8
https://doi.org/10.1109/tdei.2015.004919
https://doi.org/10.1109/tdei.2015.004919
Autor:
Yoshinobu Yasuno, Hidekazu Kodama, Yuji Suzuki, Kei Hagiwara, Toshifumi Tajima, M. Goto, Yoshinori Iguchi, Kenichi Kidokoro
Publikováno v:
IEEE Transactions on Dielectrics and Electrical Insulation. 19:1291-1298
An electret charging method employing soft X-ray irradiation for microelectromechanical systems (MEMS) electret transducers is investigated. Soft X-rays can penetrate obstructions/narrow gaps and ionize gas molecules inside air gaps. This allows embe
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::e493b349f354d5b613d54be6fd258eaf
https://doi.org/10.1109/tdei.2012.6260003
https://doi.org/10.1109/tdei.2012.6260003
Autor:
Kei Hagiwara, Kenichi Kidokoro, Yoshinobu Yasuno, Toshifumi Tajima, Yoshinori Iguchi, Masahide Goto, Hidekazu Kodama
Publikováno v:
IEEJ Transactions on Sensors and Micromachines. 132:309-315
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::8ca752f50f0fa2c5620602d7db9baaf7
https://doi.org/10.1541/ieejsmas.132.309
https://doi.org/10.1541/ieejsmas.132.309
Autor:
Kenichi Kidokoro, Yoshinori Iguchi, Masahide Goto, Yoshinobu Yasuno, Kei Hagiwara, Hidekazu Kodama, Toshifumi Tajima
Publikováno v:
The Journal of The Institute of Image Information and Television Engineers. 64:1003-1006
To develop an ultraminiature high-performance microphone for the next generation, we have been studying a silicon microphone. We previously fabricated a single-crystalline silicon microphone using original MEMS technology. The prototype microphone sh
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::cd9bb58d0fb046e9b5186cc4cacfa49f
https://doi.org/10.3169/itej.64.1003
https://doi.org/10.3169/itej.64.1003
Publikováno v:
Journal of the Society of Mechanical Engineers. 116:640-641
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::ebe5916c4debbcd2384e267425cb6a86
https://doi.org/10.1299/jsmemag.116.1138_640
https://doi.org/10.1299/jsmemag.116.1138_640
Autor:
Toshifumi Tajima, Masahide Goto, Kei Hagiwara, Yoshinobu Yasuno, Yoshinori Iguchi, Kodama Hidekazu, Kenichi Kidokoro
Publikováno v:
The Proceedings of the Symposium on Micro-Nano Science and Technology. :169-170
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::414899415cc7f905616fa6c35fcedb15
https://doi.org/10.1299/jsmemnm.2010.2.169
https://doi.org/10.1299/jsmemnm.2010.2.169
Autor:
Toshifumi Tajima, Kei Hagiwara, Yoshinori Iguchi, Hidekazu Kodama, Yoshinobu Yasuno, Masahide Goto, Kenichi Kidokoro
Publikováno v:
The Proceedings of the Symposium on Micro-Nano Science and Technology. :85-86
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::9c77a7bc5b1079aa47602424c264d2d9
https://doi.org/10.1299/jsmemnm.2009.1.85
https://doi.org/10.1299/jsmemnm.2009.1.85
Autor:
Toshifumi Tajima, Yoshinori Iguchi, Kenichi Kidokoro, Kei Hagiwara, Hidekazu Kodama, Masahide Goto, Yoshinobu Yasuno
Publikováno v:
Applied Physics Express. 3:091502
A novel charging method using soft X-ray irradiation for forming an electret of a silicon condenser microphone was developed. Soft X-rays can penetrate through the microphone diaphragm and are suitable for ionizing gas inside the microphone element.
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::e68f96381d497e505f955fcb6c7ba993
https://doi.org/10.1143/apex.3.091502
https://doi.org/10.1143/apex.3.091502
Publikováno v:
IEEE Transactions on Dielectrics & Electrical Insulation; Dec2015, Vol. 22 Issue 6, p3663-3667, 5p