Výsledky vyhledávání - "Kenichi Bandoh"

In-Situ Measurement and Control of Wafer Temperature Using Micro Sensor : 2nd Report, Sensor Fabrication Based on MEMS Technology(Mechanical Systems)

Autor: Osamu Iwabuchi, Kenichi Bandoh, Shinichi Yokota

Publikováno v: Transactions of the Japan Society of Mechanical Engineers Series C. 75:2942-2948

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::a5732a9534b42ee24e198651debdfc06
https://doi.org/10.1299/kikaic.75.2942

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Sliding-Mode Control with Nonlinear State Predictor for Nonlinear Processes with Large Time Delay and Its Application

Autor: Shigeo Morimoto, Tetsu Nagata, Takuji Okumura, Shinichi Yokota, Kenichi Bandoh

Publikováno v: TRANSACTIONS OF THE JAPAN SOCIETY OF MECHANICAL ENGINEERS Series C. 74:2001-2008

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::8149ea51f21d7b271299bcefb7911aba
https://doi.org/10.1299/kikaic.74.2001

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In-Situ Measurement and Control of Wafer Temperature Using Micro Sensor (1st Report, An Experimental Study by Using Large Model)

Autor: Shinichi Yokota, Kenichi Bandoh, Hideaki Ohkubo

Publikováno v: TRANSACTIONS OF THE JAPAN SOCIETY OF MECHANICAL ENGINEERS Series C. 74:1740-1748

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::bc2fc355e545a52253934a5aadc8ca6d
https://doi.org/10.1299/kikaic.74.1740

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Arbitrary Thermal History Control of Wafer in Photo Resist Processing Using Integrated Heating and Cooling Plate

Autor: Shinichi Yokota, Kenichi Bandoh, Mikio Minonishi

Publikováno v: TRANSACTIONS OF THE JAPAN SOCIETY OF MECHANICAL ENGINEERS Series C. 71:221-228

For photo resist processing in semiconductor manufacturing, the precise temperature control of wafer has been demanded to realize a more fine device in recent years. However, it is difficult to achieve the precise temperature control by a current waf

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::781b2ea808514c7b4efcb6f9c8463ac6
https://doi.org/10.1299/kikaic.71.221

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Master-Slaves Control Based on Model Reference Sliding-Mode Control (Temperature Locus Follow-Up Control of Multi-Zone Cooling Plate)

Autor: Shinichi Yokota, Satoshi Fukuhara, Kenichi Bandoh

Publikováno v: TRANSACTIONS OF THE JAPAN SOCIETY OF MECHANICAL ENGINEERS Series C. 70:2329-2336

Most heat treatment equipments that control a large area to uniform temperature are divided into two or more zones, and the temperature control of each zone is carried out individually. However, for two or more zones with time delay, nonlinearity, un

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::845457ebb86d2f6d5031dbc424e6e2dc
https://doi.org/10.1299/kikaic.70.2329

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Response of Proportional Valve Using Shape-Memory-Alloy Array Actuators

Autor: Masaaki Suhara, Kenichi Bandoh, Kazuhiro Yoshida, Shinichi Yokota

Publikováno v: IFAC Proceedings Volumes. 29:505-510

To realize a small size proportional valve with simple structure, a spool driving actuator using shape memory alloy (SMA) fine wires in arrayed arrangement is proposed and the response is investigated, Firstly, the basic characteristics of the actuat

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::ac264654f25b97a3ab446e050924039d
https://doi.org/10.1016/s1474-6670(17)57712-5

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A Small-Size Proportional Valve Using a Shape-Memory-Alloy Array Actuator

Autor: Masaaki Suhara, Kazuhiro Yoshida, Shinichi Yokota, Kenichi Bandoh

Publikováno v: TRANSACTIONS OF THE JAPAN SOCIETY OF MECHANICAL ENGINEERS Series B. 62:224-229

To realize a small-size proportional valve, a small-size and sufficiently high-stiffness actuator is required to drive the spool. However, with conventional actuators, such as solenoid actuators, it was difficult to realize such performance. In this

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::bd3aa68b306e74cca97998b87e3cf59b
https://doi.org/10.1299/kikaib.62.224

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