Zobrazeno 1 - 10
of 23
pro vyhledávání: '"Keng Hwa Teo"'
Autor:
Ser Choong Chong, Sanming Hu, Keng Hwa Teo, Eva Wai, Minkyu Je, Rui Li, Cheng Jin, Ming Chinq Jong, Patrick Guo-Qiang Lo, Hongyu Li
Publikováno v:
IEEE Transactions on Electron Devices. 61:2584-2587
This brief proposes an electrical method using simple resistor chain in parallel to quickly locate open circuits in a 3-D chip. This method is theoretically analyzed using the equivalent circuit, and experimentally validated by a 3-D integrated circu
Autor:
Minkyu Je, Jinglin Shi, Yong Han, Mohammad Madihian, Xiaowu Zhang, Yong Zhong Xiong, Hongyu Li, Yen Yi Germaine Hoe, Dan Zhao, Keng Hwa Teo, Jin He, Sanming Hu
Publikováno v:
IEEE Transactions on Electron Devices. 60:1282-1287
This brief proposes a guard ring using through-silicon vias (TSVs) to isolate thermal coupling in a 3-D integrated circuit (3-D IC). To verify this idea, simulation and measurement are carried out. A ring oscillator (RO) is implemented in a 65-nm CMO
Publikováno v:
IEEE Transactions on Components, Packaging and Manufacturing Technology. 2:944-955
Through-silicon via (TSV) technology has been widely investigated recently for 3-D electronic packaging integration. Reducing TSV wafer warpage is one of the most challenging concerns for successfully subsequent processes. In this paper, a wafer-leve
Autor:
Keng Hwa Teo, S. Gao, Yen Chen Yeo, Hongyu Li, Guan Kian Lau, Jaesik Lee, Justin Seetoh, Vincent Lee
Publikováno v:
IEEE Transactions on Components, Packaging and Manufacturing Technology. 1:1988-1995
The effects of temporary bonding processes on thin wafer handling were investigated. Backside dielectric curing process was found to be a critical process for the void formation in the thin wafer handling which was confirmed by scanning acoustic micr
Publikováno v:
IEEE Electron Device Letters. 34:18-20
Electrical evaluation of the impact of through-silicon via (TSV)-induced stress on 65-nm MOSFETs is presented in this letter. MOSFETs with varying widths and lengths were laid out at a minimum distance of 1.2 up to 16 μm from TSVs at different orien
Autor:
Srinivasa Rao Vempati, Eva Wai Leong Ching, Jie Li Aw, Ser Choong Chong, Hongyu Li, Keng Hwa Teo, Daniel Ismael Cereno
Publikováno v:
2013 IEEE 15th Electronics Packaging Technology Conference (EPTC 2013).
Industry is adopting three-dimensional integration of Cu-low k Chip with micro-solder bumps by stacking process to increase the functionality and performance of the device. Cu/low k is known to be very fragile and required special packaging process t
Publikováno v:
2011 IEEE 13th Electronics Packaging Technology Conference.
3D Through-silicon via (TSV) has been acknowledged as one of the future chip design technologies. In this paper, via last after Back End Of Line (BEOL) and before bonding, CMOS wafer with 18 layers of multilayer dielectric dry etching prior to deep s
Publikováno v:
2011 IEEE 13th Electronics Packaging Technology Conference.
Industry is moving towards having module with multiple functions and capabilities in order to satisfy consumer demands. Miniaturized the package will allowed more components to pack inside the electronic gadget. A low z-foot print of the package is o
Publikováno v:
2011 IEEE 13th Electronics Packaging Technology Conference.
RDL process becomes more and more important with through Si interposer (TSI) application in 3D packaging. RDL line/space needs to be shrinking with the increasing of device density. We had been developed low temperature (LT) damascene process for the
Autor:
S. Gao, Justin Seetoh, Keng Hwa Teo, Jaesik Lee, Yen Chen Yeo, Serene Thew, Hongyu Li, Vincent Lee
Publikováno v:
2011 IEEE 61st Electronic Components and Technology Conference (ECTC).
This study is conducted to develop advanced wafer thinning and handling system in 50μm thick TSV integration. Systematical investigation of the material compatibility between temporary bonding material and organic dielectric pairs is carried out in