Zobrazeno 1 - 4
of 4
pro vyhledávání: '"Ken-ichi Machinaga"'
Autor:
Kazutomo Osari, Nobuji Sakai, Noriyuki Unno, Takeshi Ohsaki, Ken-ichi Machinaga, Jun Taniguchi
Publikováno v:
Microelectronic Engineering. 87:918-921
Ultra violet nanoimprint lithography (UV-NIL), which is able to obtain the nano-scale pattern effectively and quickly, is strongly desired for the next-generation lithography technology. However, it is well known that the higher viscosity UV-curable
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::284346c329fe54dd5ee476d5c3e1e088
https://doi.org/10.1016/j.mee.2009.11.175
https://doi.org/10.1016/j.mee.2009.11.175
Publikováno v:
Microelectronic Engineering. 86:676-680
The filling behavior of resin during UV nanoimprint lithography (UV-NIL) was observed by using a ''midair structure mold'' and by changing the imprint pressure. The midair structure molds were fabricated by electron beam lithography (EBL) using hydro
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::41319713a6b66981a92294b82ada825c
https://doi.org/10.1016/j.mee.2008.12.085
https://doi.org/10.1016/j.mee.2008.12.085
Autor:
Ken ichi Machinaga, Kazutomo Osari, Nobuji Sakai, Noriyuki Unno, Takeshi Ohsaki, Jun Taniguchi
Publikováno v:
Journal of Photopolymer Science and Technology. 22:161-166
Next-generation fine patterning requires a high throughput cost-effective process for the mass producing of various devices, which has a nanometer-scale pattern over a large area. UV nanoimprint lithography (UV-NIL) is a major breakthrough in this fi
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::96ef50aa9deddd469cdb9d961e112aa0
https://doi.org/10.2494/photopolymer.22.161
https://doi.org/10.2494/photopolymer.22.161
Publikováno v:
Seikei-Kakou. 21:346-350
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::4b136215cc8d41a01e26bf7650f365f8
https://doi.org/10.4325/seikeikakou.21.346
https://doi.org/10.4325/seikeikakou.21.346