Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Ken-Hsien Hsieh"'
Autor:
Han-Ping Shen, Lin Chin-Hsiang, Yuan-Chien Huang, Chieh-Han Wu, Weng Ming-Hui, Wu Cheng-Han, Ching-Yu Chang, Tsung-Han Ko, Ken-Hsien Hsieh, Chih-Jie Lee, Chung-Ju Lee
Publikováno v:
Advances in Patterning Materials and Processes XXXV.
Directed self-assembly (DSA) of block copolymers offers opportunities for resolution enhancement of existing patterning by pitch splitting, contact hole (CH) shrinks or, improvement of pattern profile or patterning window.1-2 By co-optimization of gu
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::648ef0d481df0832525b8cfba3c09d70
https://doi.org/10.1117/12.2303492
https://doi.org/10.1117/12.2303492
Autor:
Ming-Hui Weng, Tsung-Han Ko, Chih-Jie Lee, Han-Ping Shen, Chieh-Han Wu, Ken-Hsien Hsieh, Yuan-Chien Huang, Cheng-Han Wu, Chung-Ju Lee, Ching-Yu Chang, Chin-Hsiang Lin
Publikováno v:
Proceedings of SPIE; 1/14/2018, Vol. 10586, p1-7, 7p