Zobrazeno 1 - 3
of 3
pro vyhledávání: '"Ken Horan"'
Autor:
Ken Horan, Nick E. B. Cowern, T. Tuomi, Nick Bennett, B.J. Sealy, Aapo Lankinen, L. O’Reilly, Patrick J. McNally
Publikováno v:
Materials science and engineering / B 154-155, 118-121 (2008). doi:10.1016/j.mseb.2008.09.007
Horan, Ken, Lankinen, Aapo, O'Reilly, Lisa, Bennett, N.S., McNally, Patrick J. ORCID: 0000-0003-2798-5121, Sealy, B.J., Cowern, N.E.B. and Tuomi, Tiinamaija (2008) Structural and electrical characterisation of ion-implanted strained silicon. Materials Science and Engineering: B, 154-15 . pp. 118-121. ISSN 0921-5107
Horan, Ken, Lankinen, Aapo, O'Reilly, Lisa, Bennett, N.S., McNally, Patrick J. ORCID: 0000-0003-2798-5121
The production of low resistance ultra-shallow junctions for e.g. source/drain extensions using low energy ion-implantation will be required for future CMOS devices [H. Wakabayashi, M. Ueki, M. Narihiro, T. Fukai, N. Ikezawa, T. Matsuda, K. Yoshida,
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::08143f850298c090bc26b2d90e6c2fd2
https://doi.org/10.1016/j.mseb.2008.09.007
https://doi.org/10.1016/j.mseb.2008.09.007
Autor:
Ken Horan, L. O’Reilly, Nick Bennett, Russell M. Gwilliam, T.C.Q. Noakes, B.J. Sealy, Patrick J. McNally, Aapo Lankinen, P. Bailey, Nick E. B. Cowern
Ultra-violet (UV), low penetration depth, micro-Raman spectroscopy and high resolution X-ray diffraction (HRXRD) are utilised as complementary, independent stress characterisation tools for a range of strained Si samples doped by low energy (2 keV) S
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::f8d6cef6dc504c6364aca33802bb53fd
https://surrey.eprints-hosting.org/260/
https://surrey.eprints-hosting.org/260/
Autor:
Jennifer Stopford, Arthur Henry, Dionysios Manessis, Nick Bennett, Ken Horan, David Allen, Jochen Wittge, Lars Boettcher, Aidan Cowley, Patrick McNally
Publikováno v:
Scopus-Elsevier
Heriot-Watt University
Heriot-Watt University
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=dedup_wf_001::08d7112fd01cc1851e01a1b9105c3e11
http://www.scopus.com/inward/record.url?eid=2-s2.0-84857569141&partnerID=MN8TOARS
http://www.scopus.com/inward/record.url?eid=2-s2.0-84857569141&partnerID=MN8TOARS