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pro vyhledávání: '"Ken Haffner"'
Autor:
Ken Haffner, Vladimir Pashchenko, Fazel Parsapourkolour, Ramin Matloub, Sylvain Ballandras, Paul Muralt
Publikováno v:
2016 IEEE International Ultrasonics Symposium (IUS).
A novel type of hybrid resonator based on BAW transformation into SAW in a ridged layered structure was fabricated and characterized. Bulk waves are excited by micromachined piezoelectric AlScN pillars located on the non-piezoelectric Si and sapphire
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::fdb8d1e6df4dca860bd5bc59b000cc33
https://doi.org/10.1109/ultsym.2016.7728649
https://doi.org/10.1109/ultsym.2016.7728649
Acoustic delay lines based on Al 0.85 Sc 0.15 N thin film hybrid transducers were investigated by finite element modeling. It was found that an acoustic impedance matching between transducer and non-piezoelectric substrate material plays a crucial ro
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::b2a4abceb623da751cfb3c40b930a078
https://infoscience.epfl.ch/record/233870
https://infoscience.epfl.ch/record/233870
