Zobrazeno 1 - 7
of 7
pro vyhledávání: '"Kelly L. Cassidy"'
Autor:
James H. Morris, Juan R. Maldonado, Richard M. Foster, Richard Forber, Michael Powers, Gary French, C. J. Gaeta, Kelly L. Cassidy, Henry I. Smith, Michael Lim, Serge Campeau, I. C. Edmond Turcu, Peter Hark, Charles Kelsey, Harry Rieger, Joseph Naungayan
Publikováno v:
Japanese Journal of Applied Physics. 41:4111-4121
A compact laser-produced plasma X-ray source that radiates 1 nm X-rays with an average power of 24 W in 2π steradians is presented. The X-ray conversion efficiency is 9% of the laser power delivered on target. The 300 W laser power is generated by a
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::6009a0e0526dc1f777d1cad7c326aeb7
https://doi.org/10.1143/jjap.41.4111
https://doi.org/10.1143/jjap.41.4111
Autor:
James H. Morris, Juan R. Maldonado, Kelly L. Cassidy, I. C. E. Turcu, S. M. Campeau, Joe R. Naunguyan, C. Kelsy, Richard M. Foster, G. French, C. J. Gaeta, Harry Rieger, Richard Forber, Peter Hark, Michael F. Powers, R. K. Grygier
Publikováno v:
Digest of Papers. Microprocesses and Nanotechnology 2001. 2001 International Microprocesses and Nanotechnology Conference (IEEE Cat. No.01EX468).
Summary form only given. A compact laser produced plasma X-ray source generates 24 Watts average power of 1.1 nm X-rays in 2/spl pi/ steradians. The laser-plasma source is driven by a compact, diode-pumped, solid-state 300 Watt Nd:YAG laser system.
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::417c635130bfefb08ac2302fea96ccc0
https://doi.org/10.1109/imnc.2001.984204
https://doi.org/10.1109/imnc.2001.984204
Autor:
Charles M. Dozier, Daniel A. Newman, James H. Morris, I. C. Edmond Turcu, Robert R. Whitlock, C. J. Gaeta, Thomas Kleindolph, Michael F. Powers, Richard Forber, Kelly L. Cassidy
Publikováno v:
SPIE Proceedings.
X-ray spectra of Cu plasmas at the focus of a four-beam, solid-state diode-pumped laser have been recorded. This laser-plasma X-ray source is being developed for JMAR's lithography systems aimed at high- performance semiconductor integrated circuits.
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::7bed874a1c3fe194e60b8ead198c5fc6
https://doi.org/10.1117/12.456517
https://doi.org/10.1117/12.456517
Autor:
James H. Morris, I. C. Edmond Turcu, Juan R. Maldonado, C. J. Gaeta, Kelly L. Cassidy, Harry Rieger, Henry I. Smith, M. H. Lim, Serge Campeau, Richard Forber, Michael F. Powers, Richard M. Foster
Publikováno v:
Emerging Lithographic Technologies VI.
A compact x-ray source radiates 24 Watts average power of 1nm x-rays in 2 (pi) steradians. The laser produced plasma x-ray source has a 300 W laser driver which is a compact, diode-pumped solid-state Nd:YAG laser system. The x-ray conversion efficien
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::1414d9fa1f6c7f1eb5722dbaa4b590e4
https://doi.org/10.1117/12.472353
https://doi.org/10.1117/12.472353
Autor:
C. J. Gaeta, Juan R. Maldonado, Peter Hark, Richard M. Foster, Michael F. Powers, Harry Rieger, G. French, Serge Campeau, James H. Morris, Joe R. Naunguyan, Kelly L. Cassidy, Richard Forber, Charles Kelsy, R. K. Grygier, I. C. Edmond Turcu
Publikováno v:
Advances in Laboratory-based X-Ray Sources and Optics II.
A compact laser produced plasma x-ray source radiates 24 Watts average power of 1nm x-rays in 2(pi) steradians. The x-ray power conversion efficiency is 9% from the laser average power focused on the x-ray target. The laser-plasma x-ray source is gen
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::4db44abf2e0008148d91f508a6084343
https://doi.org/10.1117/12.449863
https://doi.org/10.1117/12.449863
Autor:
Harry Rieger, J. Naungayan, H. Siegert, S. M. Campeau, Richard M. Foster, C. M. Dozier, R. R. Whitlock, D. Fleming, I. C. E. Turcu, A. Stone, J. C. Carosella, Juan R. Maldonado, Kelly L. Cassidy, S. Mrowka, M. H. Lim, Z. Cheng, M. F. Powers, C. Kelsy, Peter Hark, Richard Forber, James H. Morris, Henry I. Smith, D. Gibson, R. Selzer, D. A. Newman, C. J. Gaeta, G. French, Jay Burdett
Publikováno v:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures. 21:280
A compact laser-produced plasma x-ray source radiates 1 nm x rays with an average power of 24 W in 2π steradians. The x-ray conversion efficiency is 9% of the laser power delivered on target. The 300 W laser power is generated by a compact diode-pum
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::ad5e2396a95ed567ec1e555044e514fa
https://doi.org/10.1116/1.1539070
https://doi.org/10.1116/1.1539070
Autor:
I. C. E. Turcu, Henry I. Smith, Richard Forber, R. K. Grygier, Rajesh Menon, C. J. Gaeta, Z. W. Chen, Kelly L. Cassidy, S. Mrowka
Publikováno v:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures. 20:2984
The most efficient use of radiation point sources for x-ray lithography requires a collimator to capture a large fraction of spherically emitted radiation and deliver the rays with acceptable divergence properties. We describe an x-ray point source u
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::bc75807e9a7937e32be34d6fe3ccb556
https://doi.org/10.1116/1.1521733
https://doi.org/10.1116/1.1521733