A new precise optical autofocus system.

Autor: Fein, Michael E., Kelderman, Herman F., Neukermans, Armand P., Loh, Alan E., Wolze, David

Publikováno v: Journal of Vacuum Science & Technology: Part B-Microelectronics Processing & Phenomena; 1990, Vol. 8 Issue 6, p2017-2022, 6p