Zobrazeno 1 - 10
of 17
pro vyhledávání: '"Keisuke Namba"'
Autor:
Shinjirou Yokota, Keisuke Namba, Noriaki K. Sato, Keiichiro Imura, Hitoshi Yamaoka, Takuma Kawai, Kazuhiko Deguchi, Nozomu Hiraoka, Shinnosuke Hirokawa, Jun'ichiro Mizuki, Yoshiya Yamamoto, Kazushi Sakamoto, Tsutomu Ishimasa, Hirofumi Ishii
Publikováno v:
Scientific Reports, Vol 10, Iss 1, Pp 1-10 (2020)
Scientific Reports
Scientific Reports
Non-Fermi-liquid (NFL), a significant deviation from Fermi-liquid theory, usually emerges near an order-disorder phase transition at absolute zero. Recently, a diverging susceptibility toward zero temperature was observed in a quasicrystal (QC). Sinc
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::419d28fee5ce87887c17f7162fef0c37
http://link.springer.com/article/10.1038/s41598-020-74124-7
http://link.springer.com/article/10.1038/s41598-020-74124-7
Publikováno v:
Applied Surface Science. 91:227-233
The present paper describes the activation energy for electromigration damage (EMD) of the Cu multilayer interconnection. The Cu multilayer (TiWN/Cu/TiWN) interconnections (width ∼ 0.7 μm) were fabricated by the Ar-sputtering method. The electromi
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::66e61d7cc34544117ff629ad66dbd8f5
https://doi.org/10.1016/0169-4332(95)00123-9
https://doi.org/10.1016/0169-4332(95)00123-9
Publikováno v:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. 10:1071-1079
Atomic chlorine concentrations in Cl2 plasmas have been measured by two‐photon laser‐induced fluorescence (LIF). Experiments were performed over a wide pressure range in rf, rf magnetron, and microwave electron cyclotron resonance (ECR) discharge
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::37c436eaed31289b45eda0a809d3759e
https://doi.org/10.1116/1.578204
https://doi.org/10.1116/1.578204
Publikováno v:
The Proceedings of JSME annual Conference on Robotics and Mechatronics (Robomec). 2015:2P1-B10_1
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::65588bcb7c90f7745826cf61ee7f3820
https://doi.org/10.1299/jsmermd.2015._2p1-b10_1
https://doi.org/10.1299/jsmermd.2015._2p1-b10_1
Publikováno v:
Japanese Journal of Applied Physics. 34:3731
In situ Fourier transform infrared (FTIR) absorption spectroscopy has been used to detect reaction products resulting from the etching of Si in Cl2 plasmas. Silicon tetrachloride SiCl4 was the only gas-phase product species detected during etching. U
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::76fd586dfc9154b8b41916b6ff41eb43
https://doi.org/10.1143/jjap.34.3731
https://doi.org/10.1143/jjap.34.3731
Publikováno v:
Japanese Journal of Applied Physics. 33:4276
Ion trajectories near a submicron-patterned surface were investigated using numerical simulations including the effects of local charging on the patterned surface and ion drift velocity toward the wafer. The simulation results were also discussed rel
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::c902efb3858a22638bf38b6a2d92f1fa
https://doi.org/10.1143/jjap.33.4276
https://doi.org/10.1143/jjap.33.4276
Publikováno v:
Japanese Journal of Applied Physics. 33:4424
Electron cyclotron resonance (ECR) plasma etching of Si in Cl2 has been studied from the viewpoint of plasma chemistry. Experiments were performed over a wide pressure range (0.2–10 mTorr), using a divergent magnetic-field ECR plasma reactor suppli
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::67712f6f61c6afaece824d88c7e6fee5
https://doi.org/10.1143/jjap.33.4424
https://doi.org/10.1143/jjap.33.4424
Publikováno v:
Japanese Journal of Applied Physics. 33:1530
A new-type electron-cyclotron-resonance (ECR) plasma source has been developed for materials processing. The reactor employed magnetic multicusp fields and microwaves radially injected through an annular slit; this configuration yielded stable, unifo
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::4f6ffa989015933dce984be8a867020a
https://doi.org/10.1143/jjap.33.1530
https://doi.org/10.1143/jjap.33.1530
Platinum Etching and Plasma Characteristics in RF Magnetron and Electron Cyclotron Resonance Plasmas
Publikováno v:
Japanese Journal of Applied Physics. 32:6102
The properties of platinum etching were investigated using both rf magnetron and electron cyclotron resonance plasmas, together with measurement of the plasma parameters. Experiments were performed over a wide pressure range from 0.4 to 50 mTorr in C
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::059729f140c4663ddb3310dac926d113
https://doi.org/10.1143/jjap.32.6102
https://doi.org/10.1143/jjap.32.6102
Publikováno v:
JAPAN TAPPI JOURNAL. 40:568-574
Ozone bleaching of kraft pulp has been investigated for the purpose of developing oxygenbased pulp bleaching process as an alternative to chlorine-containing one which produces unfavourable products. In this paper, liquid phase ozone bleaching has be
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::3a59b0762e16b102c9ab2a85b8da9fc4
https://doi.org/10.2524/jtappij.40.568
https://doi.org/10.2524/jtappij.40.568