Zobrazeno 1 - 10
of 22
pro vyhledávání: '"Keiko Fujihira"'
Autor:
Keiko Fujihira, Akemi Nagae, Naoki Yutani, Kenichi Ohtsuka, Hiroshi Watanabe, Y. Fujii, T. Nakatani, Yoshiyuki Nakaki, Shuhei Nakata
Publikováno v:
Materials Science Forum. 725:53-56
SiC Schottky barrier diodes were fabricated and measured properties were characterized by device simulation. Most of devices show low leakage current, however, a few devices show leakage current larger than the values estimated from deviation of drif
Autor:
Tetsuya Takami, Yukiyasu Nakao, Shohei Yoshida, Masayuki Imaizumi, Tatsuo Oomori, Keiko Fujihira, Naruhisa Miura
Publikováno v:
Materials Science Forum. :799-802
The reliability of CVD gate oxide was investigated by CCS-TDDB measurement and compared with thermally grown gate oxide. Although the QBD of thermal oxide becomes smaller for the larger oxide area, the QBD of CVD oxide is almost independent of the in
Publikováno v:
Materials Science Forum. :1035-1038
Forward voltage of SiC pin diodes is evaluated by device simulation, where a p-type contact is described by Schottky barrier to a p-type surface region. The contact resistance is calculated from the comparison to I-V characteristic of Schottky struct
Autor:
Naruhisa Miura, Tatsuo Oomori, Yukiyasu Nakao, Tomokatsu Watanabe, Keiko Fujihira, Masayuki Imaizumi, Yoichiro Tarui
Publikováno v:
Materials Science Forum. :999-1002
A major crystalline defect which causes a pn junction reverse leakage current has been identified. A faintish stripe defect (FSD), the main cause of the leakage current, was observed in about 90% of the current leak points of our pn diodes. Double sh
Autor:
Tatsuo Oomori, Tetsuya Takami, Naoki Yutani, Keiko Fujihira, Naruhisa Miura, Ken Ichi Ohtsuka, Tomokatsu Watanabe, Yukiyasu Nakao, Masayuki Imaizumi
Publikováno v:
Materials Science Forum. :827-830
Inversion-type 4H-SiC power MOSFETs using p-body implanted with retrograde profiles have been fabricated. The Al concentration at the p-body surface (Nas) is varied in the range from 5×1015 to 2×1018 cm-3. The MOSFETs show normally-off characterist
Autor:
Shin Ichi Kinouchi, Naruhisa Miura, Yukiyasu Nakao, Tetsuya Takami, Masayuki Imaizumi, Keiko Fujihira, Yoichiro Tarui, Hiroshi Nakatake, Tatsuo Ozeki, Tomokatsu Watanabe
Publikováno v:
Materials Science Forum. :1289-1292
Prototype SiC power modules are fabricated using our class 10 A, 1.2 kV SiC-MOSFETs and SiC-SBDs, and their switching characteristics are evaluated using a double pulse method. Switching waveforms show that both overshoot and tail current, which indu
Autor:
Yoichiro Tarui, Tatsuo Ozeki, Yukiyasu Nakao, Tomokatsu Watanabe, Keiko Fujihira, Masayuki Imaizumi, Tatsuo Oomori, Tetsuya Takami, Hiroaki Sumitani, Naruhisa Miura
Publikováno v:
Materials Science Forum. :1285-1288
4H-SiC epilayer channel MOSFETs are fabricated. The MOSFETs have an n- epilayer channel which improves the surface where the MOS channel is formed. By the optimization of the epilayer channel and the MOSFET cell structure, an ON-resistance of 12.9 mc
Autor:
Kenichi Ohtsuka, Masayuki Imaizumi, Yoichiro Tarui, Kazumasa Kawase, Tatsuya Shiramizu, Tetsuya Takami, Jyunji Tanimura, Keiko Fujihira, Tatsuo Ozeki
Publikováno v:
Solid-State Electronics. 49:896-901
4H–SiC(0 0 0 1) MOSFET annealed in N2O at below 1150 °C is systematically investigated. Inversion-type planar MOSFETs show higher channel mobility and lower threshold voltage by increasing anneal temperature. Through C–V measurement of n-type MO
Publikováno v:
Materials Science Forum. :697-700
The effect of N2O anneal on channel mobility of inversion-type 4H-SiC n-channel MOSFET has been systematically investigated. It is found that the mobility increases with increasing anneal temperature from 900 to 1150°C. The highest field effect mobi
Publikováno v:
Materials Science Forum. :161-164