Repairing of Cr-photo-mask by ultrafast- pulse laser

Autor: Hiroko Okuyama, Motoki Watanabe, Mamoru Okutomi, Masanao Tani, Takeyo Tsukamoto, Takeyoshi Nakayama, Yuki Kondo, Masaru Sugirua, S. Oyama, Y. Kawasaki, Satoshi Ihara, N. Morirnoto, A. Yokotani, M. Tomita, Quan Li, S. Kubodera, H. Takakusaki, Yoshihisa Uchida, Toshio Goto, Tatuya Kyotani, Jianrong Qiu, H. Yanagita, Keiu Tokumura, Masataka Murahara, Katsunori Tsunoda, Jun Yamada, Hirotaka Nakayama, Nobuyuki Takahashi, Akira Obara, Noriaki Nishi, Nobuo Ando, Nobuo Isii, T. Hashidume, S. Yosihara, Zhengxin Liu, K. Sugioka, Takashi Inoue, K. Miura, Shigeru Yamaguchi, Tetsuya Hattori, H. Matsuno, T. Ikagame, Kouji Higashikawa, Xiaoyang Zeng, Takeshi Sasaki, Jun Kamiiisaka, H. Sano, Hideo Furuhashi, Y. Kawakami, Mineo Hiramatu, Tetukazu Tanaka, Hirofumi Yajima, T. Kawashima, A. Masagaki, Takashi Obara, Sadao Fujii, T. Mori, Takuya Takasaki, Y. Mase, Kozo Yasuda, Yoshiyuki Uchida, M. Ishii, Takenari Mori, Y. Shinto, K. Kadota, Kunimitsu Takahashi, Hiromi Kawase, Takahisa Jitsuno, Masayuki Okoshi, J. Kawanaka, Naoto Koshizaki, Hitoki Yoneda, N.B. Dahotre, H. Ashizawa, Kenichi Ueda, Shigeto Kobayashi, Tomoo Fujioka, Akinori Kaji, T. Hirayama, Nobuo Yasunaga, K. Makino, Masafumi Ito, Akihiro Kono, R. Nomura, Hikaru Kouta, Hideyuki Horisawa, Chobei Yamabe, Kazuyuki Akagawa, Shinji Motokoshi, Tadahiro Ishii, Kazuyuki Hirao, Naoshige Hayashi, J. Nakata, N. Takezoe, S. Ito, Hiroyuki Niino, Mitsugu Hanabusa, J. Morimoto, Keiji Fuse, Yukinori Hato, Sachiko Umeda, Satoru Nishio, Koichi Toyoda, Naokatsu Yamamoto, Y. Minami, T. Kubota, Yukio Nakajima, Hiroyasu Sato, Masaru Hori, H. Takai, Nobuhiro Akasaka, Hiroshi Ito, E. Ozawa, Takeshi Okada, Kazuyoshi Tanaka, W. Sasaki, Mikio Muro, K. Midorikawa, Tsuguru Shirakawa, M. Hasegawa, T. Suzuki, Saburoh Satoii, Masahiro Nakatsuka, Masayuki Nakamura, T. Igarashi, Shigenori Kuriki, Keiji Ebata, Tadatake Sato, Shinnosuke Nozaki, Manabu Shiozaki, K. Suzuki, Kazushi Fujita, K. Hirobe, T. Mitsuyu, H. Iizuka, Hironari Mikata, Koichi Tsukamoto, K. Obata, K. Kurosawa, K. Kumagai, Masashi Ishimine, Takashi Fushimi, Shigeru Semura, T. Sato, Akira Yabe, Koichi Sasaki, Kazuyuki Okada, S. Nakjima, Y. Maezono, Akiyoshi Matsuzaki

Publikováno v: The Review of Laser Engineering. 27:73-77,80

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::49b994848da5b54c991ec1a8c436238e
https://doi.org/10.2184/lsj.27.supplement_73

Characteristic of diffractive optical element for arbitrary pattern beam shaping

Autor: Keiji Fuse, Kyoji Matsushima, Keiji Ebata, Kenichi Kurisu, Takayuki Hirai

Publikováno v: SPIE Proceedings.

Laser materials processing has been used increasingly over the wide area of electronic industries, especially for drilling microvias in printed circuit boards, and poly-silicon annealing for thin film transistor of liquid crystal display. Intensity d

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::dcba734c929f9e3a28a77a982b074733
https://doi.org/10.1117/12.596369

Developments in SiO 2 multistep diffractive optical element for beam homogenizing

Autor: Keiji Ebata, Takeshi Okada, Kenichi Kurisu

Publikováno v: SPIE Proceedings.

Diffractive Optical Element (DOE) is an advanced optics which utilizes the optical diffraction phenomena by a microstructure on its surface and can realize various applications such as homogenizing, shaping and splitting in laser material processing.

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::4d146ddf50a3d9ebe7940c2634cc6004
https://doi.org/10.1117/12.528817

Characteristic of ZnSe aspheric beam homogenizer for CO 2 laser

Autor: Hirokuni Namba, Keiji Ebata, Takayuki Hirai, Takeshi Okada, Manabu Shiozaki, Keiji Fuse

Publikováno v: SPIE Proceedings.

Laser processing is now being used increasingly in the area of electronics, especially, for drilling micro holes in printed circuit. But the intensity distribution of laser beam mainly based on Gaussian is not uniform. Therefore, the demand for unifo

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::f5ca8542924ce8012f7b59ad4c526212
https://doi.org/10.1117/12.497929

Diffractive/refractive hybrid f-theta lens for laser drilling of multilayer printed circuit boards

Autor: Keiji Fuse, Takeshi Okada, Keiji Ebata

Publikováno v: SPIE Proceedings.

A new type of f-theta lens has been recently developed for state-of-the-art microvia laser drilling of multilayer printed circuit boards. It employs a diffractive / refractive hybrid lens element which has a blazed surface-relief microstructure on an

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::c674f35a10e5e4089f9b404f253f780c
https://doi.org/10.1117/12.486556