Zobrazeno 1 - 6
of 6
pro vyhledávání: '"Keiichiro Niitsu"'
Autor:
Jiwang Yan, Keiichiro Niitsu
Publikováno v:
Precision Engineering. 62:213-222
A nanosecond pulsed Nd:YVO4 laser was irradiated on a boron-doped single-crystal silicon wafer after rough and fine grinding processes to recover the grinding-induced subsurface damages. The surface topography of samples was investigated by using a w
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::2650d71bec7a7a6af8a4c90662ba518d
https://doi.org/10.1016/j.precisioneng.2019.12.005
https://doi.org/10.1016/j.precisioneng.2019.12.005
Publikováno v:
Materials Science in Semiconductor Processing. 82:54-61
A nanosecond pulsed Nd:YAG laser was irradiated on a boron-doped single-crystal silicon wafer with a diamond grinding finish to recover the grinding-induced subsurface damage. In order to visualize and measure the depth of the laser melted/recrystall
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::c33345b6c7b02d52b9a31723c1046e17
https://doi.org/10.1016/j.mssp.2018.03.029
https://doi.org/10.1016/j.mssp.2018.03.029
Publikováno v:
Key Engineering Materials. 701:97-100
Silicon wafers are the most widely used semiconductor substrates. It has been considered that silicon wafers after chemomechanical polishing (CMP) have no subsurface defects. However, in fact, defects such as dislocation and latent microcracks will r
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::286dc267d04c725fad76559a0d948293
https://doi.org/10.4028/www.scientific.net/kem.701.97
https://doi.org/10.4028/www.scientific.net/kem.701.97
Publikováno v:
Surface and Coatings Technology. 272:239-245
A series of CrSiCN coatings with various Si concentrations were deposited on Si(100) wafers, and the influence of Si content on the microstructure, mechanical property and crack resistance of the coatings was investigated by XRD, Raman spectroscopy a
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::3968fc1be9d37d5acd4968b04bd4d8cd
https://doi.org/10.1016/j.surfcoat.2015.04.001
https://doi.org/10.1016/j.surfcoat.2015.04.001
Publikováno v:
Surface Topography: Metrology and Properties. 7:015013
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::3eec91ef89f207cdc2ec52185a1541a7
https://doi.org/10.1088/2051-672x/aafe3c
https://doi.org/10.1088/2051-672x/aafe3c
Autor:
Jiwang Yan, Keiichiro Niitsu
Publikováno v:
The Proceedings of The Manufacturing & Machine Tool Conference. :119-120
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::a4cc8203beefab1feb50e970bceda940
https://doi.org/10.1299/jsmemmt.2014.10.119
https://doi.org/10.1299/jsmemmt.2014.10.119