Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Keebum Jung"'
Autor:
YoungHun Kwon, Vijay Ramani, Ki-Ho Kim, JunWoo Lee, YoungSun Oh, HakY Yoon, JongPil Kim, HeungSoo Choi, Satya Kurada, Grant Shoji, Min-Ho Kim, Keebum Jung, Vikram Gunda, HyeongJu Choi, Ho-Seong Kang
Publikováno v:
ECS Transactions. 27:209-214
With advanced design rules, yield learning challenges have scaled up. Identifying and analyzing yield killer defects are one of the major part of the issue. In this work, an advanced Inspection platform - '2810 DUV Broadband Brightfield' Inspection t
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::c2aa34a2d41251372e9025667c5fa181
https://doi.org/10.1149/1.3360621
https://doi.org/10.1149/1.3360621
Autor:
Lei Zhu, Keebum Jung, Miguel Fung, Christopher Dennis Bencher, Hichem M'Saad, Sang H. Ahn, Bok Hoen Kim
Publikováno v:
MRS Proceedings. 745
A plasma-enhanced chemical vapor deposition-based nitrogen-free dielectric anti-reflective coating was successfully developed for use in 90nm interconnects in conjunction with low κ materials. By choosing N-free precursors, it was possible to elimin
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::f4897021b2bc44f525023dbd97fed8cb
https://doi.org/10.1557/proc-745-n6.2
https://doi.org/10.1557/proc-745-n6.2