Zobrazeno 1 - 10
of 15
pro vyhledávání: '"Kechun Ma"'
Autor:
Ilia V. Uvarov, Pavel S. Shlepakov, Artem E. Melenev, Kechun Ma, Vitaly B. Svetovoy, Gijs J. M. Krijnen
Publikováno v:
Actuators, Vol 10, Iss 3, p 62 (2021)
Microfluidic devices providing an accurate delivery of fluids at required rates are of considerable interest, especially for the biomedical field. The progress is limited by the lack of micropumps, which are compact, have high performance, and are co
Externí odkaz:
https://doaj.org/article/819c97e2db0740a0a62786fd05657f29
Autor:
Jörg Hübner, Flemming Jensen, Henri Jansen, Vy Thi Hoang Nguyen, Pele Leussink, Kechun Ma, Wim De Malsche, Roy Cork, Evgeniy Shkondin
Publikováno v:
Hoang Nguyen, V T, Jensen, F, Hübner, J, Shkondin, E, Cork, R, Ma, K, Leussink, P, De Malsche, W & Jansen, H 2021, ' Cr and CrO x etching using SF 6 and O 2 plasma ', Journal of Vacuum Science and Technology B: Nanotechnology and Microelectronics, vol. 39, no. 3, 032201 . https://doi.org/10.1116/6.0000922
Chromium is a frequently encountered material in modern nanofabrication, directly as a functional material (e.g., photomask generation) or indirectly as a hard mask (e.g., to etch quartz). With the continuous downscaling of devices, the control of th
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::16fb18de6382a64d907010edd12853ed
https://hdl.handle.net/20.500.14017/141e4971-a372-404e-91c7-b22376a6508a
https://hdl.handle.net/20.500.14017/141e4971-a372-404e-91c7-b22376a6508a
Autor:
Kechun Ma, I. V. Uvarov, Gijs J. M. Krijnen, Vitaly B. Svetovoy, P. S. Shlepakov, Artem E. Melenev
Publikováno v:
Actuators, Vol 10, Iss 62, p 62 (2021)
Actuators, 10(3):62. Multidisciplinary Digital Publishing Institute (MDPI)
Actuators
Volume 10
Issue 3
Actuators, 10(3):62. Multidisciplinary Digital Publishing Institute (MDPI)
Actuators
Volume 10
Issue 3
Microfluidic devices providing an accurate delivery of fluids at required rates are of considerable interest, especially for the biomedical field. The progress is limited by the lack of micropumps, which are compact, have high performance, and are co
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::77b84812acbd963ddbe00434286cf4f4
https://www.mdpi.com/2076-0825/10/3/62
https://www.mdpi.com/2076-0825/10/3/62
Autor:
Roy Cork, Henri Jansen, Peixiong Shi, Flemming Jensen, Meint J. de Boer, Vy Thi Hoang Nguyen, Pele Leussink, Chantal Silvestre, Kechun Ma, Jörg Hübner
Publikováno v:
ECS journal of solid state science and technology, 9(2):024002. The Electrochemical Society Inc.
Nguyen, V T H, Silvestre, C, Shi, P, Cork, R, Jensen, F, Hubner, J, Ma, K, Leussink, P, de Boer, M & Jansen, H 2020, ' The CORE Sequence: A Nanoscale Fluorocarbon-Free Silicon Plasma Etch Process Based on SF 6 /O 2 Cycles with Excellent 3D Profile Control at Room Temperature ', ECS Journal of Solid State Science and Technology, vol. 9, no. 2, 024002 . https://doi.org/10.1149/2162-8777/ab61ed
Nguyen, V T H, Silvestre, C, Shi, P, Cork, R, Jensen, F, Hubner, J, Ma, K, Leussink, P, de Boer, M & Jansen, H 2020, ' The CORE Sequence: A Nanoscale Fluorocarbon-Free Silicon Plasma Etch Process Based on SF 6 /O 2 Cycles with Excellent 3D Profile Control at Room Temperature ', ECS Journal of Solid State Science and Technology, vol. 9, no. 2, 024002 . https://doi.org/10.1149/2162-8777/ab61ed
This study focuses on the development of a fluorocarbon-free directional silicon etching process, called CORE (Clear, Oxidize, Remove, and Etch) in which a switching sequence of SF6 and O2 is operated at room temperature. This distinguishes it from t
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::838be3863581ab09b6f177110b6cb7e2
https://research.utwente.nl/en/publications/ef5a1174-05b5-40d7-a0b2-2c21e8f91dda
https://research.utwente.nl/en/publications/ef5a1174-05b5-40d7-a0b2-2c21e8f91dda
Publikováno v:
Scientific Reports
Scientific reports, 4:4296. Nature Publishing Group
Scientific reports, 4:4296. Nature Publishing Group
Microsystems become part of everyday life but their application is restricted by lack of strong and fast motors (actuators) converting energy into motion. For example, widespread internal combustion engines cannot be scaled down because combustion re
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::3faa1874d12935e89d3dee96efef70f0
https://doi.org/10.1038/srep04296
https://doi.org/10.1038/srep04296
Miniaturised Prandtl tube with integrated pressure sensors for micro-thruster plume characterisation
Autor:
M.J. de Boer, Mindert Dijkstra, Kechun Ma, Jarno Groenesteijn, Joost Conrad Lötters, Remco J. Wiegerink
Publikováno v:
MIEEE 27th International Conference on Micro Electro Mechanical Systems, MEMS 2014, 999-1002
STARTPAGE=999;ENDPAGE=1002;TITLE=MIEEE 27th International Conference on Micro Electro Mechanical Systems, MEMS 2014
STARTPAGE=999;ENDPAGE=1002;TITLE=MIEEE 27th International Conference on Micro Electro Mechanical Systems, MEMS 2014
A miniaturised Prandtl-tube sensor incorporating a 6 mm long 40 μm diameter microchannel with integrated pressure sensors has been realised. The sensor has been designed for the characterisation of rarefied plume flow from a MEMS-based monopropellan
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::f6817e644ed0ed1d9db63290a9a6a2e0
https://doi.org/10.1109/memsys.2014.6765812
https://doi.org/10.1109/memsys.2014.6765812
Autor:
Gijsbertus J.M. Krijnen, Remco J. Wiegerink, Kechun Ma, R.A. Brookhuis, Theodorus S.J. Lammerink
Publikováno v:
17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), 2737-2740
STARTPAGE=2737;ENDPAGE=2740;TITLE=17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII)
STARTPAGE=2737;ENDPAGE=2740;TITLE=17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII)
A miniature capacitive force sensor for the measurement of shear- and normal force at the fingertip is designed and realized. The sensor has a circular design with a corrugated silicon ring around the force sensitive area. This ring provides the spri
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::8a5ac4688922924f7a39bdacd28b2aa2
https://doi.org/10.1109/transducers.2013.6627372
https://doi.org/10.1109/transducers.2013.6627372
Autor:
Mubassira B. Syed Nawazuddin, Miko Elwenspoek, Kechun Ma, Theo S.J. Lammerink, Meint J. de Boer, Erwin Berenschot, Remco J. Wiegerink
Publikováno v:
Challenges
Volume 3
Issue 2
Pages 261-277
Challenges, 3(2), 261-277. MDPI
Challenges, Vol 3, Iss 2, Pp 261-277 (2012)
Volume 3
Issue 2
Pages 261-277
Challenges, 3(2), 261-277. MDPI
Challenges, Vol 3, Iss 2, Pp 261-277 (2012)
Ever since its prediction, experimental investigation of the Casimir force has been of great scientific interest. Many research groups have successfully attempted quantifying the force with different device geometries
however, measurement of the
however, measurement of the
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::411aa1c2d370d1c3a5476ec55e4456c5
Autor:
Theodorus S.J. Lammerink, R.A. Brookhuis, Michael Curt Elwenspoek, Remco J. Wiegerink, M.J. de Boer, Kechun Ma
Publikováno v:
Micro Electro Mechanical Systems (MEMS), 2012 IEEE 25th International Conference on, 595-598
STARTPAGE=595;ENDPAGE=598;TITLE=Micro Electro Mechanical Systems (MEMS), 2012 IEEE 25th International Conference on
STARTPAGE=595;ENDPAGE=598;TITLE=Micro Electro Mechanical Systems (MEMS), 2012 IEEE 25th International Conference on
A scalable silicon six-axis force-torque sensor is designed and realized to be used for measurement of the power transfer between the human body and the environment. Capacitive readout is used to detect all axial force components and all torque compo
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::dc2c74e1de35ba8484d861decdd196fb
https://research.utwente.nl/en/publications/b53fde65-6cd8-48ab-9813-e9d2b6c7e493
https://research.utwente.nl/en/publications/b53fde65-6cd8-48ab-9813-e9d2b6c7e493
Autor:
R.A. Brookhuis, Kechun Ma, Gijsbertus J.M. Krijnen, Remco J. Wiegerink, M.J. de Boer, Theodorus S.J. Lammerink, Remco G.P. Sanders
Publikováno v:
Journal of micromechanics and microengineering, 25(2):025012. Institute of Physics (IOP)
A miniature force sensor for the measurement of forces and moments at a human fingertip is designed and realized. Thin silicon pillars inside the sensor provide in-plane guidance for shear force measurement and provide the spring constant in normal d
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::31c6f1efb09dbf96dd484d0b0b34a791
https://doi.org/10.1088/0960-1317/25/2/025012
https://doi.org/10.1088/0960-1317/25/2/025012