Zobrazeno 1 - 3
of 3
pro vyhledávání: '"Kazutsugu Murakami"'
Publikováno v:
Materials Science Forum. 963:259-262
Phase contrast microscopy (PCM) technique was demonstrated as the effective non-destructive discrimination method of TSDs and TEDs in 4H-SiC epitaxial layers in comparison with conventional polarized light microscopy, PL topography, KOH etch pit insp
Publikováno v:
Applied Physics Express. 11:075501
The superior nondestructive distinguishability of threading screw dislocations and threading edge dislocations in SiC epitaxial layers by phase-contrast microscopy using our optical system was demonstrated by comparing our experimental results with t
Publikováno v:
Applied Physics Express; Jul2018, Vol. 11 Issue 7, p1-1, 1p