Zobrazeno 1 - 10
of 24
pro vyhledávání: '"Kazutoshi Takenoshita"'
Autor:
Ken Kakiyama, Kazutoshi Takenoshita, Shinichi Namba, Yuya Katada, Singo Ikeno, Hideo Nojima, Shota Murakami
Publikováno v:
Engineering Journal, Vol 17, Iss 5 (2013)
Reactive species created by a microhollow cathode discharge (MHCD) in He+H2O mixtures were investigated at 160 Torr using the molecular beam mass spectrometry. Ion currents of He+, HeH+, O+, OH+, H+(H2O), and H+(H2O)2 were measured as functions of H2
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::6113b9f1ef54527b4d666edf17085e1a
https://doi.org/10.4186/ej.2013.17.5.29
https://doi.org/10.4186/ej.2013.17.5.29
Autor:
Simi George, Moza M. Al-Rabban, Vivek Bakshi, Martin Richardson, Chiew-seng Koay, C. Keyser, Kazutoshi Takenoshita
The development of a source bright enough for EUVL, possessing the required long-term stability within a reasonable cost, is forcing plasma physicists to address issues associated with dense plasmas that have up until now received scant attention. Wi
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::17244bc0c8a10335efb1e5edc84555fd
https://doi.org/10.1117/3.613774.ch26
https://doi.org/10.1117/3.613774.ch26
Publikováno v:
Optics express. 15(25)
A comprehensive study of the spectral and Mo-Si mirror inband EUV emission from tin-doped droplet laser plasma targets irradiated with a single 1064 nm beam from an Yb:doped fiber laser is reported.With pre-pulse enhancement, in-band conversion effic
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::c8c040a562abb72222675ffc8bbeca06
https://pubmed.ncbi.nlm.nih.gov/19550925
https://pubmed.ncbi.nlm.nih.gov/19550925
Autor:
Martin Richardson, Robert Bernath, Simi George, Reuvani D. Kamtaprasad, Kazutoshi Takenoshita
Publikováno v:
Frontiers in Optics 2008/Laser Science XXIV/Plasmonics and Metamaterials/Optical Fabrication and Testing.
Detailed spectroscopic studies on extreme ultra violet (EUV) emission from tin-doped droplet laser plasmas were completed using a combination of spectroscopic instruments that allow for quantitative spectroscopy throughout the radiation region of 5-5
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::1b22729f5fe3eea14277e582eb0b9a8c
https://doi.org/10.1364/fio.2008.fwu4
https://doi.org/10.1364/fio.2008.fwu4
Autor:
J. Cunado, Christopher G. Brown, Tobias Schmid, Simi George, J. Duncan, Robert Bernath, Kazutoshi Takenoshita, Martin Richardson
Publikováno v:
LEOS 2007 - IEEE Lasers and Electro-Optics Society Annual Meeting Conference Proceedings.
A stabilized targeting scheme is installed in the EUV light source facility and performs high level of stability of tin-doped droplet target positioning for a long term, which is required for the EUVL sources.
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::363349759e3e7bc9b0c3f769d8fa02fb
https://doi.org/10.1109/leos.2007.4382490
https://doi.org/10.1109/leos.2007.4382490
Autor:
N. Hay, Tobias Schmid, S. Ellwi, Kazutoshi Takenoshita, Martin Richardson, I. Hendarson, Simi George, J. Cunado, B. Fulford
Publikováno v:
2007 Quantum Electronics and Laser Science Conference.
High EUV source power has been demonstrated with a laser-plasma source exhibiting low debris and high conversion efficiency. This offers a viable path towards successful realization of EUV lithography for the next generation semiconductor devices.
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::739d672b37e78166514c9796ae7db9ed
https://doi.org/10.1109/qels.2007.4431518
https://doi.org/10.1109/qels.2007.4431518
Autor:
Robert Bernath, William T. Silfvast, Chiew-Seng Koay, Simi George, Kazutoshi Takenoshita, Gregory M. Shimkaveg, Martin Richardson
Publikováno v:
Optics letters. 32(8)
Detailed spectroscopic studies on extreme UV emission from laser plasmas using tin and lithium planar solid targets were completed. At 13.5 nm, the best conversion efficiency (CE) for lithium was found to be 2.2% at intensities near 7 x 10(10) W/cm(2
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::3d1f9e1a6c944a7e6ed81db5755aeec5
https://pubmed.ncbi.nlm.nih.gov/17375180
https://pubmed.ncbi.nlm.nih.gov/17375180
Autor:
Moza M. Al-Rabban, Chiew-Seng Koay, Kazutoshi Takenoshita, J. Cunado, Tobias Schmid, Christopher G. Brown, William T. Silfvast, Martin Richardson, Simi George, Robert Bernath
Publikováno v:
SPIE Proceedings.
Tin-doped droplet target has been integrated with several lasers including high power high repetition rate lasers and demonstrated high conversion efficiencies for all the lasers. This implies the EUV source power is linearly increasing as the laser
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::d1a743e1b4a2f9494d4475e230a04658
https://doi.org/10.1117/12.713461
https://doi.org/10.1117/12.713461
Publikováno v:
SPIE Proceedings.
Tin is one of the most efficient source materials for both gas discharge plasma sources and laser produced plasma sources for EUV lithography. Unlike Xenon which was the material commonly investigated for the EUVL source application, recycling of the
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::4bedf14afd3fba70345484ea2462112d
https://doi.org/10.1117/12.713463
https://doi.org/10.1117/12.713463
Autor:
Christopher G. Brown, Chiew-Seng Koay, Robert Bernath, Martin Richardson, Somsak Teerawattanasook, Kazutoshi Takenoshita, Simi George, J. Cunado, Tobias Schmid
Publikováno v:
SPIE Proceedings.
In this work we present the status of our high repetition-rate/high power EUV source facility. The masslimited target concept has demonstrated high conversion efficiencies (CE) previously, with precision solid state lasers. Currently, experiments are
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::035ad13a5b31b95f4beb407ae52454f9
https://doi.org/10.1117/12.713457
https://doi.org/10.1117/12.713457