Zobrazeno 1 - 3
of 3
pro vyhledávání: '"Kazuteru Mori"'
Autor:
Takayo Hachiya, Kazuteru Mori, Toshiyuki Ohdaira, Hiroyuki Kamijo, Akira Uedono, R. Suzuki, Kentarou Imamizu, Masahiko Hasunuma, Kenichi Ito, Hisashi Kaneko, Hiroshi Toyoda
Publikováno v:
Japanese Journal of Applied Physics. 46:L483-L485
Positron annihilation was used to probe vacancies in Cu films deposited by Ta/SiO2/Si using electroplating and sputtering techniques. During room temperature grain growth (i.e., self-annealing) of the Cu films, two different types of vacancies (small
Publikováno v:
RADIOISOTOPES. 47:623-627
The measurement system for Doppler broadening profiles with the coincidence technique using a NaI detector in colinear geometry with a Ge detector was developed. The principle of measurement system with the coincidence technique between the NaI detec
Publikováno v:
Japanese Journal of Applied Physics. 39:6647
Hydrogenated microcrystalline silicon (µc-Si:H) films of 10 nm thickness were prepared by the plasma-enhanced chemical vapor deposition method on glass substrates that had been coated by a layer composed of Si, O, and N. The chemical composition of