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pro vyhledávání: '"Kazutaka Watakabe"'
Publikováno v:
SPIE Proceedings.
This paper presents an experimental study of resist heating effect in mask making with a variable shaped electron beam mask writer. Experiments were performed at current densities of 40 and 80 A/cm 2 on mask blanks with a chemically amplified resist.
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::e79fdce7259daf48fb7e3bfd4517dd27
https://doi.org/10.1117/12.728984
https://doi.org/10.1117/12.728984
