Zobrazeno 1 - 3
of 3
pro vyhledávání: '"Kazutaka Tsukahara"'
Publikováno v:
MRS Advances. 7:1431-1434
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::7ff11a569aa937d0df08b9e0744b349a
https://doi.org/10.1557/s43580-022-00378-0
https://doi.org/10.1557/s43580-022-00378-0
Autor:
Yoji Kawasaki, Mitsuaki Kabasawa, Sho Kawatsu, Kazutaka Tsukahara, Hiroyuki Kariya, Masazumi Koike, Makoto Sano
Publikováno v:
2016 21st International Conference on Ion Implantation Technology (IIT).
This paper will examine the influence of ion angle deviation (IAD) on sheet resistance. The IAD is derived from the beam intensity profile measured in the MC3-II/GP medium current implanter. IAD is controlled independently in the horizontal and verti
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::e9714f048e71476bd61469a0644f0936
https://doi.org/10.1109/iit.2016.7882905
https://doi.org/10.1109/iit.2016.7882905
Autor:
Makoto Sano, Yoji Kawasaki, Sho Kawatsu, Masazumi Koike, Hiroyuki Kariya, Mitsuaki Kabasawa, Toshiki Miyake, Kazutaka Tsukahara
Publikováno v:
2016 21st International Conference on Ion Implantation Technology (IIT).
In ion implantation, repeatability of sheet resistances (Rs) is indispensable for process stability monitoring. In the course of process development, we found Rs instability in some implant conditions such as B, 7keV, and 9E13cm2 with tilt of 7
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::17ca1dd65e1ecd7c6a388c6c4fb58e00
https://doi.org/10.1109/iit.2016.7882891
https://doi.org/10.1109/iit.2016.7882891