Zobrazeno 1 - 10
of 13
pro vyhledávání: '"Kazuo Sukegawa"'
Autor:
Ikuhiro Yamamura, Satoshi Yamaguchi, Yoshihiro Takao, Hiroshi Kudo, Naoki Nagashima, Michiari Kawano, Yoshiyuki Kotani, Satoru Asai, Nobuhisa Naori, Keizaburo Yoshie, Takashi Nagano, Masaya Uematsu, Kazuo Sukegawa, Shingo Kadomura, Junichi Mitani
Publikováno v:
Microelectronics Reliability. 42:15-25
This paper describes a 0.11 μm CMOS technology with high-reliable copper (Cu) and very low k (VLK) (k
Autor:
Toshihiko Mori, R. Sasagawa, Shoichiro Kawashima, Kazuo Sukegawa, I. Fukushi, Shigetoshi Wakayama, M. Hamaminato
Publikováno v:
IEEE Journal of Solid-State Circuits. 33:793-799
This paper proposes and reports a low-power SRAM using a charge-transfer (CT) pre-sense amplifier and a bus signal encoding scheme. The CT amplifier overcomes the V/sub th/ relative difference between the pair MOS transistors, and thus reduces the in
Autor:
M. Nishikawa, Kazuo Sukegawa, T. Miyashita, Takae Sukegawa, H. Kurata, T. Yamamoto, K. Hashimoto, Keiji Ikeda, Naoyoshi Tamura, Masataka Kase, Y. Shimamune, A. Hatada, Y. S. Kim, Tomohiro Kubo, M. Fukuda
Publikováno v:
Extended Abstracts of the 2008 International Conference on Solid State Devices and Materials.
Autor:
M. Nishikawa, H. Nagai, Y. S. Kim, Hiroyuki Ohta, Kenichi Okabe, K. Ohkoshi, Keiji Ikeda, Takae Sukegawa, Masataka Kase, S. Satoh, Tomohiro Kubo, Akiyoshi Hatada, H. Kurata, Y. Hayami, Kazuo Sukegawa, Naoyoshi Tamura, Toshihiro Sugii, T. Miyashita, Y. Shimamune, T. Yamamoto
Publikováno v:
2008 Symposium on VLSI Technology.
We found that the relatively low temperature millisecond annealing at S/D activation for nFET is enhanced the co-implanted halo activation regardless of sequence of MSA and spike-RTA. Tilt-and-twist extension implantation technique with millisecond e
Autor:
Kenichi Okabe, Keiji Ikeda, Masataka Kase, Akiyoshi Hatada, Kazuo Sukegawa, Toshihiro Sugii, S. Satoh, Y. Shimamune, Y. S. Kim, T. Miyashita, H. Kurata, Hiroyuki Ohta, H. Fukutome, Hiroshi Morioka, M. Fukuda, Y. Hayami, Naoyoshi Tamura, Kazuo Kawamura, M. Tajima, J. Ogura
Publikováno v:
2008 International Symposium on VLSI Technology, Systems and Applications (VLSI-TSA).
Direct comparison between competitive process flows showed that the eSiGe-S/D-last flow is the most promising CMOS integration process for manufacturing 45-nm technology node and beyond because it has good extensibility with various performance boost
Autor:
Toshihiro Sugii, Akiyoshi Hatada, Kazuo Sukegawa, K. Ohkoshi, Keiji Ikeda, Toshihiko Mori, M. Tajima, H. Fukutome, S. Satoh, Kenichi Okabe, Naoyoshi Tamura, Hiroyuki Ohta
Publikováno v:
2007 IEEE International Electron Devices Meeting.
A new powerful strain booster named as dopant confinement layer (DCL) technique is proposed for the first time. DCL technique is a novel stress memorization technique (SMT). Our proposed method doesn't require any additional capping layers used in SM
Autor:
Toshiro Futatsugi, Hiroki Futatsuya, Keiji Ikeda, M. Terahara, Atsuhiro Tsukune, Toshihiro Sugii, T. Arita, E. Yoshida, M. Osawa, Masataka Kase, Y. Shimoda, M. Kojima, M. Okuno, T. Watanabe, T. Shirasu, Ken Sugimoto, Michie Sunayama, M. Tajima, Y. Sanbonsugi, H. Ochimizu, S. Satoh, M. Fukuda, Teruyoshi Yao, H. Kurata, J. Ogura, Hisaya Sakai, M. Oryoji, M. Yamaji, Hiroshi Kudo, Y. Mizushima, Kazuo Sukegawa, T. Yamamoto
Publikováno v:
2007 International Symposium on VLSI Technology, Systems and Applications (VLSI-TSA).
A 45 nm low-cost LSTP CMOS technology is presented. This technology features advanced ArF lithography using SRAF, low-leak transistors fabricated by optimized SiON and S/D junction design, CoSi2, SRAM cell with acceptable operational margin, and full
Autor:
Y. Hayami, Kazuo Kawamura, T. Sakuma, Kazuo Sukegawa, Masashi Shima, Shintaro Sato, Tamotsu Owada, K. Okoshi, Shunichi Fukuyama, Ken Sugimoto, K. Hosaka, Hiroshi Minakata, H. Kokura, K. Hashimoto, H. Ota, Tsunehisa Sakoda, Takayuki Aoyama, Naoyoshi Tamura, Motoshu Miyajima, Toshihiko Mori, Satoshi Nakai, J. Ogura, Akira Katakami, Akiyoshi Hatada, Kenichi Okabe, T. Miyashita, Y. Shimamune, Akio Yamaguchi, Hiroshi Morioka, Sergey Pidin, M. Kojima, T. Watanabe, Toshihiro Sugii, H. Fukutome, M. Okuno, Masafumi Nakaishi, T. Isome
Publikováno v:
2006 Symposium on VLSI Technology, 2006. Digest of Technical Papers..
High-performance low operation power (LOP) transistors were developed for 45nm node universal applications. A high uniaxial strain and low resistance NiSi technique, enhanced by a slit under the slim and high Young's modulus (YM) offset spacer covere
Autor:
Takayoshi Minami, Toshihiro Sugii, K. Hashimoto, Akira Katakami, Y. Shimamune, S. Satoh, Toshihiko Mori, Y. Hayami, Motoshu Miyajima, Akiyoshi Hatada, M. Kojima, M. Fukuda, Kazuo Sukegawa, Naoyoshi Tamura, Hiroshi Morioka, Kazuo Kawamura, T. Sakuma, J. Ogura, Y. S. Kim, Hiroyuki Ohta
Publikováno v:
2006 International Electron Devices Meeting.
The impact of defects on the short channel effects (SCE) and the drivability of a pMOSFET with a SiGe source/drain is described, and useful methods to reduce defect formation are suggested. The influence of defects on device performance is found to b
Autor:
Shin'ichi Kawai, Hirokazu Suzuki, Suguru Warashina, Osamu Tsuboi, Kazuo Sukegawa, Keniji Takada, Seiichiro Kawamura, Shinichi Sekine
Publikováno v:
Japanese Journal of Applied Physics. 35:988
This paper describes the various advantages of silicon on insulator (SOI) circuits when well-established 0.8 µm Complementary Metal Oxide Semiconductor (CMOS) mass-production technologies for ultra-low power 1 V phase locked loop (PLL) circuits are