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pro vyhledávání: '"Kazuhito Nakagawa"'
Autor:
Kazuhito Nakagawa, Tomohiko Hara, Takefumi Kamioka, Taichi Tanaka, Yuki Isogai, Yoshio Ohshita
Publikováno v:
Electronic Materials Letters. 17:399-405
Effect of lights with various wavelength on the defect generation in reactive plasma deposition (RPD) process is studied using capacitance–voltage analysis. Indium-tin oxide (ITO) deposition by RPD dramatically decreases the minority carrier lifeti