Zobrazeno 1 - 10
of 20
pro vyhledávání: '"Kazuhito Matsukawa"'
Autor:
Ryoichi Suzuki, Kazuhito Matsukawa, Koun Shirai, Toshiyuki Ohdaira, Masanori Fujinami, Takashi Akahane, Koichi Oguma
Publikováno v:
Japanese Journal of Applied Physics. 58:096501
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::d23ec544bcf12dd38e582d75b85e381f
https://doi.org/10.7567/1347-4065/ab352c
https://doi.org/10.7567/1347-4065/ab352c
Autor:
Toshio Suzuki, I. Hachiuma, Takayuki Yamaguchi, A. Ozawa, Koichiro Asahi, Hiroaki Ueno, Kazuhito Matsukawa, K. Suzuki, H. Oishi, Koun Shirai, Takuji Izumikawa, Y. Kobayashi, Takashi Ohtsubo, Kensaku Matsuta, K. Yamada, Y. Ito, Akihiro Yoshimi, Tetsuaki Moriguchi, Yuichi Ichikawa, D. Nagae, Yoko Ishibashi, Takashi Nagatomo, T. Minamisono, T. Kubo, D. Horikawa, Maya Takechi, M. Fukuda, Sadao Momota, Mototsugu Mihara, Yoshikazu Hirayama, K. Satoh, T. Kuboki, D. Nishimura, Y. Namiki, K. Namihira, Shinji Suzuki
Publikováno v:
Hyperfine Interactions. 197:143-147
The β-NMR study of short-lived nucleus 58Cu (I π = 1 + , T 1/2 = 3.2 s) in Si has been performed. Spin polarization of 58Cu induced by the charge exchange reaction of 58Ni was observed in Si at 15 K. The 58Cu magnetic moment $|\upmu[^{58}\mbox{Cu}]
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::6e7a6ba154fc814221c05f1f6f9b544e
https://doi.org/10.1007/s10751-010-0249-5
https://doi.org/10.1007/s10751-010-0249-5
Publikováno v:
Physica B: Condensed Matter. 404:4685-4688
We report a first-time attempt of diffusion control of impurities by IR excitation, by using an intensive synchrotron radiation facility, BL43IR of SPring-8. Although the result is discouraging, the plan, experimental setup, irradiation experiment, a
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::0b13ac5f7e73e82721149e1fe16eadd0
https://doi.org/10.1016/j.physb.2009.08.155
https://doi.org/10.1016/j.physb.2009.08.155
Publikováno v:
ECS Transactions. 16:267-272
We have demonstrated the feasibility of the First - Principles calculation method to make predictions for designing new gettering centers. We have evaluated the possibility of gettering centers for Cu using stable complexes of light elements such as
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::525f5e928d697d32e281001bcb3abb5f
https://doi.org/10.1149/1.2980310
https://doi.org/10.1149/1.2980310
Autor:
Yoji Mashiko, Kazuhito Matsukawa, Hidekazu Yamamoto, T. Katayama, Koji Fukumoto, Yasuhiro Kimura
Publikováno v:
Electrochemistry. 76:661-665
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::95b89b8dad7397c3ffff78657b98b906
https://doi.org/10.5796/electrochemistry.76.661
https://doi.org/10.5796/electrochemistry.76.661
Publikováno v:
Physica B: Condensed Matter. :151-154
Diffusion of 3d transition-metal impurities in silicon has been theoretically studied. The chemical trend in the diffusion barrier over all the elements is well reproduced by ab initio pseudopotential method. However, for heavier elements, the energy
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::302db3fd44d3c3302774c93fb96ea01f
https://doi.org/10.1016/j.physb.2007.08.134
https://doi.org/10.1016/j.physb.2007.08.134
Autor:
Xiaofei Yang, M. Tanaka, Akira Ozawa, Takuji Izumikawa, Mototsugu Mihara, Shinichi Shinozaki, Takashi Ohtsubo, Y. Saito, Shunsuke Okada, Yusuke Morita, Masako Ogura, Seiki Inaba, Kazunari Yamada, Takayuki Yamaguchi, Yoko Ishibashi, Takashi Nagatomo, Junichi Ohno, K. Imamura, Yoshio Kobayashi, Maya Takechi, Koun Shirai, Ryosuke Kanbe, Takumi Fujimura, Daisuke Nagae, Suzuki Takeshi, Tadanori Minamisono, Kazuhito Matsukawa, Kensaku Matsuta, Yasuto Kamisho, Yasushi Abe, Hideki Ueno, Sadao Momota, Mitsunori Fukuda, Daiki Nishimura
Publikováno v:
Proceedings of the Conference on Advances in Radioactive Isotope Science (ARIS2014).
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::1d843ae715d5a44657d5c8f1689fa8cb
https://doi.org/10.7566/jpscp.6.030114
https://doi.org/10.7566/jpscp.6.030114
Autor:
Nobuyoshi Hattori, Shigeto Maegawa, Koun Shirai, Kazuhito Matsukawa, Hiroshi Katayama-Yoshida
Publikováno v:
Solid State Phenomena. :115-124
The binding energy between 3d transition metals (TM) such as iron (Fe), nickel (Ni) and copper (Cu), and boron (B) in Si are studied using first-principles molecular dynamics method. The binding energies of between each TM for Fe, Ni, Cu and B are 0.
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::b6ef9a992780b14f3fb4d5b406e18ce4
https://doi.org/10.4028/www.scientific.net/ssp.108-109.115
https://doi.org/10.4028/www.scientific.net/ssp.108-109.115
Publikováno v:
Applied Surface Science. 216:371-375
The gettering mechanism of Cu and Co in various wafers has been quantitatively studied by the measurement of Cu and Co distribution using radioactive isotope tracer method. We found quantitative gettering of Cu and Co in P/P + epitaxial wafer with po
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::4f8e6d1ac1d7f3653f601cb31f6b890c
https://doi.org/10.1016/s0169-4332(03)00438-0
https://doi.org/10.1016/s0169-4332(03)00438-0
Publikováno v:
Japanese Journal of Applied Physics. 41:5900-5903
We have studied the behavior of metal impurities such as Cu and Ni with different isolation techniques in ULSI devices. We have found by using convergent beam electron diffraction (CBED) that the stress in a shallow trench isolation (STI) structure i
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::ddbfbb6dff9eb8094310852ed08abaa4
https://doi.org/10.1143/jjap.41.5900
https://doi.org/10.1143/jjap.41.5900