Zobrazeno 1 - 3
of 3
pro vyhledávání: '"Kazuhiro Tonari"'
Autor:
Shinichi Nakamata, Masahide Gotoh, Makoto Utsumi, Akihiro Otsuki, Masaaki Miyajima, Yukihiro Furukawa, Hajime Okumura, Tomohiro Imai, Yugo Tanigaki, Naoyuki Oose, Kazuhiro Tonari, Takenori Fujiwara, Mina Ryo, Kenji Fukuda, Hiroshi Kumura, Takao Sakai, Yoshiyuki Sakai
Publikováno v:
Materials Science Forum. :677-680
Cost of silicon carbide (SiC) wafer has been improved owing to the development of larger and higher quality wafer technologies, while the process stays long and complicated. In this paper, we propose a novel short process of ion implantation and prov
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::64c0296ab0c14ef4e4d7a4f084002cba
https://doi.org/10.4028/www.scientific.net/msf.778-780.677
https://doi.org/10.4028/www.scientific.net/msf.778-780.677
Autor:
Mina Ryo, Takanori Fujiwara, Naoyuki Oose, Hajime Okumura, Yugo Tanigaki, Kazuhiro Tonari, Tomohiro Imai, Kenji Fukuda, Makoto Utsumi, Masaaki Miyajima, Takao Sakai, Akihiro Otsuki, Yukihiro Furukawa, Shinichi Nakamata, Masahide Gotoh, Yoshiyuki Sakai, Hiroshi Kumura
Publikováno v:
Journal of Photopolymer Science and Technology. 27:233-236
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::ccdf0b834930de7c5dcc58e60da30de1
https://doi.org/10.2494/photopolymer.27.233
https://doi.org/10.2494/photopolymer.27.233
Autor:
Hajime Okumura, Hiroshi Harima, Tsunenobu Kimoto, Masahiro Yoshimoto, Heiji Watanabe, Tomoaki Hatayama, Hideharu Matsuura, Tsuyoshi Funaki, Yasuhisa Sano
Selected, peer reviewed papers from the 15th International Conference on Silicon Carbide and Related Materials (ICSCRM 2013), September 29 – October 4, 2013, Miyazaki, Japan
