Zobrazeno 1 - 8
of 8
pro vyhledávání: '"Kazuhiko Mimoto"'
Autor:
Masahito TAGAWA, Hitoshi AKIMICHI, Chiharu MAEDA, Masahiro HIRATA, Shin-ichi NISHIZAWA, Seiji HIROKI, Sadamitsu TANZAWA, Takashi ARAI, Tetsuya ABE, Katsusuke SHIMIZU, Jyun-nosuke NAKATANI, Shizuma KURIBAYASHI, Megumi NAKAMURA, Toru SASAKI, Yoshiro SHIOKAWA, Nozomu HATTORI, Takafumi MORII, Masaaki HIRAI, Masahiko KUSAKA, Motohiro IWAMI, Zhao-Xiong XIE, Kayo IWASE, Ken-ichi TANAKA, Toshimi SUTOU, Tomohiro UMEZAWA, Daisuke ESASHIKA, Shigeru SAITO, Tetsuo SOUMURA, Shuji ISONO, Hideki YAMASAKI, Hakuto MURAKAMI, Masahiko YAMAMOTO, Takuji OYAMA, Takashi IKUNO, Jeong-Tak Ryu, Shigeharu OHKURA, Yang-Gyu Baek, Shin-ichi HONDA, Mitsuhiro KATAYAMA, Masahiko KITAGAWA, Kenjiro OURA, Keiichi FUJIMOTO, Kuei-Yi LEE, Nobuhiko OTA, Shinji SHINABE, Yuto FUKUMA, Yusuke SUETSUGU, Yao-Jane HSU, Yasunori TANIMOTO, Youichirou HORI, Ken-ichi KANAZAWA, Masanori KOBAYASHI, Masahide GOTOH, Koichi SUDOH, Hiroshi IWASAKI, Keisuke KAMETANI, Touichi HATANO, Masato KIUCHI, Katsutoshi TANAKA, Seiji TAKECHI, Satoshi SUGIMOTO, Seiichi GOTO, Tsukasa KOBAYASHI, Ryoki TOBE, Teruo YANAGIHASHI, Tetsuro OBAYASHI, Shigemi SUGINUMA, Tetsuo OGAWA, Kiyohide KOKUBUN, Takashi SEKIDO, Ichiro TAKANO, Yoshio SAWADA, Yoshiaki SAKURAI, Akio OKAMOTO, Toshikazu NOSAKA, Hiroya NAKAJIMA, Hiroshi KODA, Masaaki YOSHITAKE, Toyohito UCHIZONO, Toshiaki YASUI, Hirokazu TAHARA, Takao YOSHIKAWA, Akio SUZUKI, Jun SAKAMOTO, Takeshi MITSUHASHI, Akihito MORI, Takanori AOKI, Tatsuhiko MATSUSHITA, Masahiro OKUDA, Hiroyuki NAKANO, Hideo FURUHASHI, Toshio YOSHIKAWA, Akinori MAEDA, Yoshiyuki UCHIDA, Kenzo KOJIMA, Asao OHASHI, Shizuyasu OCHIAI, Teruyoshi MIZUTANI, Yasuharu YAMASHITA, Shu KUROKAWA, Akira SAKAI, Tomohide SASAKI, Tetsuro SHIRAO, Nobuhiro KANEKO, Keniche SHUDO, Masatoshi TANAKA, Kaoru OJIMA, Masamichi YOSHIMURA, Kazuyuki UEDA, Joselito LABIS, Akihiko OHI, Toshinori FUJIKI, Tadao TODA, Hiroshi HARIMA, Nobumasa KIWA, Yasuhito GOTOH, Hiroshi TSUJI, Junzo ISHIKAWA, Yoichiro YGI, Kiminori KAKITANI, Hiroko KAJI, Akio YOSHIMORI, Kazuhiko HASEGAWA, Wilson A. Dino, Hideaki KASAI, Ayao OKIJI, Katsuhisa CHIDA, Tetsumi TANABE, Yoshitsugu ARAKAKI, Morio YOSHIZAWA, Kouji NODA, Katsuhiro NAKAMURA, Yasushi YAMANO, Shinichi KOBAYASHI, Yoshio SAITO, Yoshihiro SATOH, Tomio KUBO, Hideharu MATSUSHIMA, Ken KASUGA, Hiroki ASARI, Norihiko IMAIZUMI, Kentarou SEKIKAWA, Masahiro SHIBUSAWA, Keisuke TAJIRI, Zenzaburo KABEYA, Yoshikazu NAKAYAMA, Shin AKIDUKI, Kazuhiro HASHIMOTO, Masamitu TAKAHASI, Jun'ichiro MIZUKI, Kazuhisa TAMURA, Toshihiro KONDO, Kohei UOSAKI, Shigeharu TAMURA, Masato YASUMOTO, Nagao KAMIJO, Yoshio SUZUKI, Mitsuhiro AWAJI, Akihisa TAKEUCHI, Hidekazu TAKANO, Hiroshi ITOH, Hidehiko NONAKA, Shingo ICHIMURA, Masahiro TOSA, Kazutaka MITSUISHI, Masaki TAKEGUCHI, Yoshio FUKUDA, Masahiro GOTO, Akira KASAHARA, Kazuo FURUYA, Kazuhiro YOSHIHARA, Kazuhiko MIMOTO, Takashi MATSUMOTO, Kunio OKIMURA, Kimiko SATO, Tsutomu TAKAHASHI, Tadashi NAKAMURA, Naohiro HORII, Akihiro INOUE, Nobuharu OHSAKO, Takeshi MIYASHITA, Kengo HIDAKA, Atsushi TANAKA, Hisahiro TANGE, Yuji TANAKA, Katsumi NISHIMURA, Takashi KOJIMA, Nozomu TAKAGI, Tatsuo WAKAIDA, Takeo HOSAKA, Akira SAKAZAKI, Takahiro OKADA, Akihiro TANAKA, Yasunori Yamamura, Yoshiyuki MIZUNO, Teiichi HOMMA, Sin'ichi INOUE, Yuhjin YAMAZAKI, Toshiaki FUJINO, Tomohisa OKUNO, Ken-ichi OHTOMI, Ken'ichi MIURA, Itsuo ISHIGAMI, Hideaki HOSHINO, Tomoyuki MIZUKOSHI, Fumihiro URATANI, Hiroshi NAKANISHI, Won-chul Moon, Tatsuo YOSHINOBU, Osamu SUEKANE, Masakazu TANAKA, Toshiko OKUI, Katsuhito ARAKAWA, Shigehiko HASEGAWA, Hisao NAKASHIMA, Miwako KUBO, Hiroshi MORIKAWA, Shizuo FUJITA, Shigeo FUJITA, Toshinari YAMAZAKI, Toshio YOSHIZAWA, Toshio KIKUTA, Shigeki HIROBAYASHI, Noriyuki NAKATANI, Tatsuo YAMABUCHI, Masatomo NISHIURA, Toru KANAJI, Makoto TANAKA, Z. An
Publikováno v:
SHINKU. 44:326-400
Autor:
Takae Takeuchi, Matsumoto Takashi, Takaomi Matsutani, Seiichi Goto, Masato Kiuchi, Kazuhiko Mimoto
Publikováno v:
Vacuum. 59:152-158
We deposited silicon carbide (SiC) films formation using electron cyclotron resonance (ECR) plasma of methylsilane (SiH3CH3), and investigated the influence of a carrier gas (Ar or Xe). The SiC film deposition on Si (1 0 0) was carried out at a relat
Autor:
Michiru NISHIWAKI, Akihiro YAMAMOTO, Shigeki KATO, Yusuke SUETSUGU, Susumu KATO, Hirohisa TAKAHASHI, Tatsuo ASAMAKI, Mina YAGIHARA, Takashi ADACHI, Takao SEKI, Akio ABE, Hiroto KURIYAMA, Takato HIRAYAMA, Ichiro ARAKAWA, Teronobu MIYAZAKI, Naoto KIKUCHI, Yoshihiro SAWAHIRA, Eiji KUSANO, Hidehito NANTO, Akira KINBARA, Makoto MATSUI, Yukio INOKUTI, Kazuhiro SUZUKI, Michimasa KIKUCHI, Toshiyuki HIGASHINO, Katsuto TANAHASHI, Jiro OSAKA, Yuichi KAWAMURA, Naohisa INOUE, Yoshikazu HOMMA, Kunio TAKAYANAGI, Masahiro HIRATA, Nobuhiko OTA, Shinji SHINABE, Yuto FUKUMA, Yoshiro SHIOKAWA, Masakazu ICHIKAWA, Ken-ichi KANAZAWA, Hiromi HISAMATSU, Masayuki SHIMAMOTO, Masayuki SATO, Mitsuru SHIRAI, Osamu KONNO, Yuuki WATANABE, Shinichi KOBAYASHI, Yoshio SAITO, Kentarou SEKIKAWA, Kiyomitsu ASANO, Hiroki ASARI, Hideharu MATSUSHIMA, Hiroshi MIMA, Kazutugu MURAKAMI, Atushi KAWAHARA, Toshio MASUOKA, Soichi OGAWA, Shigemi SUGINUMA, S.S. HONG, K.H. CHUNG, Kouichi HAMADA, Masaki HESAKA, Hiroki KURISU, Setuo YAMAMOTO, Mituru MATSUURA, Yasunori YANAGISAWA, Akira KASAHARA, Masatoshi TOSA, Young-Sung Kim, Kazuhiro YOSHIHARA, Yuden TERAOKA, Akitaka YOSHIGOE, Mutsumi SANO, Hiroko KAJI, Kiminori KAKITANI, Yoichiro YAGI, Akio YOSHIMORI, Hiroshi TSUJI, Hitoshi SASAKI, Hiroko SATO, Yasuhito GOTOH, Junzo ISHIKAWA, Shunsuke KIDO, Michiko YOSHITAKE, Yarrama-Reddy APARNA, Hiroaki TANAKA, Kimio OKUNO, Minoru NAGAI, Masahiko TOMITORI, Kaoru ABE, Takayuki TSUGUEDA, Kazuya SAITO, Masamichi MATSUURA, Toshiyuki OHYA, Hiroyuki NAGAHAMA, Tetsuo SHIMOMURA, Seiichiroh YOKOYAMA, Masahiko MITSUHASHI, Seishiro OHYA, Kotaro SHINOHARA, Ichiro SENBA, Kunio OKIMURA, Tomohiro ARAKAWA, Hideaki TAKEZAWA, Tadashi NAKAMURA, Chikanori INO, Yasuhiro ARAKI, Yasuhiro IGASAKI, Nobuo SAITO, Isamu NAKAAKI, Hiromu IWATA, Sigeaki NAKAMURA, Shoji YOSHIOKA, Tomuo YAMAGUCHI, Ryuta AI, Kiyotaka WASA, Yoshiki MORIKAWA, Tetsuya NISHIGUCHI, Masaharu MIYAMOTO, Shingo ICHIMURA, Hidehiko NONAKA, Masakuni KAWADA, Hiroshi MURAKAMI, Hideo HASEGAWA, Ayako HIOKI, Kazuki NATSUKAWA, Shinichi NISHIZAWA, Kazuo MACHIDA, Akiko N. ITAKURA, Tetsuya NARUSHIMA, Masahiro KITAJIMA, Ruediger BERGER, Christoph GERBER, James K. GIMZEWSKI, Tetsu MIENO, Hiroaki ITO, Hiroki KAWADA, Miyuki YAMANE, Hiroyuki KITSUNAI, Nobuo TSUMAKI, Manabu YAMASHITA, Shinichi SUZUKI, Yoshitaka NAITOH, Yoshifumi OHSHIMA, Hiroyuki HIRAYAMA, Ken-ichi TANAKA, Masamichi IKAI, Shigehiko YAMAMOTO, Toru KANAJI, Takashi MORII, Masatomo NISHIURA, Makoto TANAKA, Yukio Yasuda, Hiroya Ikeda, Shigeaki Zaima, Yasuo KIMURA, Daisei SHOJI, Masanori SHINOHARA, Michio NIWANO, Takeshi KITAHARA, Hideki TANAKA, Hiroyuki WAKIMOTO, Goro MIZUTANI, Sukekatsu USHIODA, Koichiro MITSUKE, Makoto SAKURAI, Sin-ichi IGARASHI, Aki TOSAKA, Daisuke IGUCHI, Tomomi HIRAOKA, Shinjiro YAGYU, Takahiro KONDO, Toshiyuki IKEUCHI, Da-ling Lu, Takayoshi SAITOH, Suguru SAIKI, Kazuhiro FUKUSHIMA, Shigeru MIZUNO, Shin-ichiro TAGUCHI, Hideki SATO, Masao SASAKI, Makoto SATO, Yukito NAKAGAWA, K.Hassan Bhuiyan, Hideaki Inoue, Yoshikazu TAKAHASHI, Yoshihiro IKEDA, Masato KIUCHI, Takaomi MATSUTANI, Takae TAKEUCHI, Takashi MATSUMOTO, Kazuhiko MIMOTO, Seiichi GOTO
Publikováno v:
SHINKU. 43:381-454
Autor:
Satoshi KUROKOUCHI, Masayuki OKABE, Mitsuyoshi SAITO, Shinsaku MORITA, Yoshiro SHIOKAWA, Masakazu ICHIKAWA, Seiichiro KANNO, Tatehito USUI, Koichi SUDOH, Tatsuo YOSHINOBU, Hiroshi IWASAKI, Hiroaki TANAKA, Kimio OKUNO, Tadao MIURA, Touru SUMIYA, Katsuya HONDA, Shun-ichiro TANAKA, Yukio INOKUTI, Kazuhiro SUZUKI, Nastuki TAKAHASHI, Osamu OHKUBO, Yoshihiro SAWAHIRA, Akishige SATO, Naoto KIKUCHI, Eiji KUSANO, Hidehito NANTO, Akira KINBARA, Tetsuya NARUSHIMA, Akiko ITAKURA, Takaya KAWABE, Masahiro KITAJIMA, Masaru KITAGAWA, Toshiyuki OHYA, Hiroyuki NAGAHAMA, Sei-ichiroh YOKOYAMA, Ichiro ARAKAWA, Takashi ADACHI, Takato HIRAYAMA, Koichiro MITSUKE, Makoto SAKURAI, Sin-ichi IGARASHI, Yukiko ABE, Yasuo IRIE, Miyuki KAMBE, Aki TOSAKA, Satoko HAMAMATSU, Satoshi ISHII, Yoshiyuki NORIMITSU, Toshimi SUTOU, Noriyuki UBUKATA, Yoshihiro OINUMA, Shigeru SAITO, Masaaki KATOH, Kenichi TAJIMA, Daisuke HORIMOTO, Takeo OHTE, Akira KOJIMA, Seiya OHI, Takashi SHIOYA, Kazuhiko KOBAYASHI, Hidefumi NAKAJIMA, Satoshi YOKOYAMA, Hiroyuki OBARA, Hajime SAKAI, Yasuhiro OGOSHI, Takuro KOIKE, Koichiro UCHIMURA, Hitoshi TABATA, Tomoji KAWAI, Yutaka HIBINO, Guochun XU, Yasuo SUZUKI, Masao TANIHARA, Yukio IMANISHI, Shigemi SUGINUMA, Masahiro HIRATA, Hitoshi AKIMICHI, Kyoko TAKEUCHI, Yutaka TUZI, Masahiro TOSA, Akira KASAHARA, Kyung Sub LEE, Kazuhiro YOSHIHARA, Tomonari TANAKA, Tadashi SAWADA, Wataru SUGIYAMA, Koyu OTA, Daisuke YAMAUCHI, Shinobu SATO, Masatoshi TANAKA, Masaaki KISHIDA, Masahiko TOMITORI, Kiyotaka ASAKURA, Wang-Jae CHUN, Yasuhiro IWASAWA, Kiminori KAKITANI, Hiroko KAJI, Yoichiro YAGI, Akio YOSHIMORI, Akio OKAMOTO, Toshikazu NOSAKA, Masaaki YOSHITAKE, Souichi OGAWA, Shigeaki NAKAMURA, Nobuo SAITO, Shoji YOSHIOKA, Isamu NAKAAKI, Hideo HASEGAWA, Toshiyuki MIHARA, Shoichi MOCHIZUKI, Shigeharu TAMURA, Hironori KOBAYASHI, Ryoji MAKABE, Tadashi ISHIDA, Yoshiyuki SATO, Masanori ANDO, Tetsuhiko KOBAYASHI, Ayako HIOKI, Kazuki NATSUKAWA, Koji INOUE, Yoshikazu NAKAYAMA, Takayuki SATO, Shinichiro MICHIZONO, Yoshio SAITO, Shinichi KOBAYASHI, Kiyohide KOKUBUN, Yuuki WATANABE, Heizo TOKUTAKA, Kikuo FUJIMURA, Tatsuo SHIMIZU, Yasushiro NISHIOKA, Hideki TANAKA, Hiroyuki WAKIMOTO, Toshihiko MIYAZAKI, Goro MIZUTANI, Sukekatsu USHIODA, Yoshitake YAMAGUCHI, Satoru TAKAKUSAGI, Makoto KATO, Yuji SAKAI, Akira KUROKAWA, Shingo ICHIMURA, Ken NAKAMURA, Takanori AOKI, Syogo TODA, Akio SUZUKI, Tatsuhiko MATSUSHITA, Masahiro OKUDA, Kazuaki HAMAJI, Yoshiharu KAKEHI, Tsutom YOTSUYA, Norihiro MATSUOKA, Yoshitsugu TSUTSUMI, Hideki TOMIOKA, Yoshio OKAMOTO, Kensuke MURAI, Masato YASUMOTO, Norimasa UMESAKI, Hirohiko NAKANO, Toshiaki TATSUTA, Jiro MATSUO, Isao YAMADA, Hiroyuki MAGARA, Osamu TABATA, Touichi HATANO, Masatoshi KOTERA, Kiyoshi YAMAGUCHI, Naohiro HORII, Kunio OKIMURA, Akira SHIBATA, Hiroshi MURAKAMI, Ikuya KAMEYAMA, Satoru SUKENOBU, Kazuhiko MIMOTO, Takashi MATSUMOTO, Takafumi YOSHIKAWA, Masato KIUCHI, Seiichi GOTO, Masatoshi OHBA, Yoshiaki AGAWA, Kazuma SHIBUTANI, Hiroshi TSUJI, Yasuhito GOTOH, Junzo ISHIKAWA, Hiroki KAWADA, Hiroyuki KITSUNAI, Nobuo TSUMAKI, Masanori KATSUYAMA, Shinichi SUZUKI, Katsuto TANAHASHI, Yuichi KAWAMURA, Naohisa INOUE, Yoshikazu HOMMA, Michimasa KIKUCHI, Kazumasa ISHIKAWA, Teiichi HOMMA, Yoshinori SUGANUMA, Nan LI, Katsuyoshi KOBAYASHI, Nobuyoshi SAKAKIBARA, Yoshiki UENO, Masayuki AOKI, Toshiaki YASUI, Keito MORIMOTO, Hirokazu TAHARA, Takao YOSHIKAWA, Hidekazu KODERA, Masahiko UOTA, Yoshihiro SATOH, Tomio KUBO, Kozo MOCHIJI, Naoshi ITABASHI, Hiroshi SHIMIZU, Shunsuke OHTANI, Kazuhiko OKUNO, Nobuo KOBAYASHI
Publikováno v:
SHINKU. 42:417-495
Autor:
Kazuhiko Mimoto, Masatoshi Ohba, Agawa Yoshiaki, Masato Kiuchi, Takafumi Yoshikawa, Seiichi Goto, Matsumoto Takashi
Publikováno v:
SHINKU. 42:341-344
A low-energy ion beam deposition apparatus with a Freeman type sputter ion source was developed. It is useful to investigate the process of thin film formation under deposition of ions with a well-defined energy. Energy distributions of Ti+, Fe+, C+
Autor:
Kunio Okimura, Tomohiro Umezawa, Kentarou Sekikawa, Hitoshi Akimichi, Chiharu Maeda, Shigehiko Hasegawa, Asao Ohashi, Megumi Nakamura, Yao-Jane Hsu, Seiji Takechi, Tetsuro Shirao, Keiichi Fujimoto, Atsushi Tanaka, Tetsuya Abe, Tomohisa Okuno, Mitsuhiro Katayama, Satoshi Sugimoto, Shizuma Kuribayashi, Toshimi Sutou, Teiichi Homma, Masaki Takeguchi, Hisahiro Tange, Akinori Maeda, Zhao-Xiong Xie, Ken'ichi Miura, Jyun-Nosuke Nakatani, Yasushi Yamano, Masahiro Tosa, Jun'ichiro Mizuki, Hiroko Kaji, Masaaki Yoshitake, Shigeharu Ohkura, Hiroki Asari, Z. An, Akihiro Inoue, Shin-Ichi Nishizawa, Toru Sasaki, Akira Kasahara, Tetsuo Soumura, Akio Yoshimori, Nobuhiro Kaneko, Yoshio Sawada, Hideki Yamasaki, Yoshiro Shiokawa, Hiroshi Itoh, Junzo Ishikawa, Masamichi Yoshimura, Kazuhiko Mimoto, Tsutomu Takahashi, Tatsuhiko Matsushita, Kazuyuki Ueda, Takuji Oyama, Toshihiro Kondo, Tadao Toda, Yoshikazu Nakayama, Morio Yoshizawa, Kiyohide Kokubun, Ichiro Takano, Nozomu Takagi, Akira Sakai, Masahiro Shibusawa, Masatomo Nishiura, Takao Yoshikawa, Shizuyasu Ochiai, Nobuhiko Ota, Hideharu Matsushima, Masaaki Hirai, Masakazu Tanaka, Masahiko Kusaka, Akira Sakazaki, Tomoyuki Mizukoshi, Toshikazu Nosaka, Tomio Kubo, Shigeru Saito, Shuji Isono, Yuhjin Yamazaki, Sadamitsu Tanzawa, Hiroshi Iwasaki, Kazuhiro Yoshihara, Kimiko Sato, Toshinori Fujiki, Masahiro Goto, Osamu Suekane, Yasunori Yamamura, Takashi Arai, Tsukasa Kobayashi, Shigemi Suginuma, Joselito Labis, Kazuhiko Hasegawa, Jun Sakamoto, Shin-Ichi Honda, Yasuharu Yamashita, Takashi Sekido, Shu Kurokawa, Kaoru Ojima, Naohiro Horii, Keniche Shudo, Teruyoshi Mizutani, Tatsuo Yamabuchi, Masanori Kobayashi, Wilson Agerico Diño, Keisuke Tajiri, Hiroshi Koda, Masahiko Kitagawa, Kiminori Kakitani, Akihito Mori, Yusuke Suetsugu, Hirokazu Tahara, Masahito Tagawa, Takashi Matsumoto, Katsuhito Arakawa, Hiroshi Harima, Ryoki Tobe, Noriyuki Nakatani, Ken Kasuga, Kengo Hidaka, Yuto Fukuma, Fumihiro Uratani, Katsusuke Shimizu, Yoshitsugu Arakaki, Takeshi Miyashita, Seiji Hiroki, Tetsuo Ogawa, Kazuhisa Tamura, Kuei-Yi Lee, Akihiro Tanaka, Shinichi Kobayashi, Takanori Aoki, Masatoshi Tanaka, Tadashi Nakamura, Ken-Ichi Ohtomi, Akihiko Ohi, Yuji Tanaka, Takeshi Mitsuhashi, Nozomu Hattori, Teruo Yanagihashi, Sin'ichi Inoue, Koichi Sudoh, Shin Akiduki, Masato Kiuchi, Katsuhisa Chida, Toshiko Okui, Yoshio Fukuda, Jeong-Tak Ryu, Makoto Tanaka, Masahiro Hirata, Ayao Okiji, Miwako Kubo, Tomohide Sasaki, Daisuke Esashika, Tatsuo Yoshinobu, Akihisa Takeuchi, Norihiko Imaizumi, Tetsumi Tanabe, Masato Yasumoto, Hidekazu Takano, Kazuo Furuya, Kenzo Kojima, Toru Kanaji, Yoshiaki Sakurai, Touichi Hatano, Takahiro Okada, Takashi Kojima, Keisuke Kametani, Hiroshi Nakanishi, Toshio Kikuta, Shingo Ichimura, Kohei Uosaki, Itsuo Ishigami, Motohiro Iwami, Takeo Hosaka, Hidehiko Nonaka, Shigeo Fujita, Hiroyuki Nakano, Toshiaki Fujino, Kayo Iwase, Yasunori Tanimoto, Ken-ichi Kanazawa, Toyohito Uchizono, Yang-Gyu Baek, Shizuo Fujita, Yoshio Saito, Shigeharu Tamura, Shinji Shinabe, Yoichiro Ygi, Katsuhiro Nakamura, Nobumasa Kiwa, Mitsuhiro Awaji, Takashi Ikuno, Hakuto Murakami, Youichirou Hori, Toshiaki Yasui, Toshinari Yamazaki, Tetsuro Obayashi, Kazutaka Mitsuishi, Akio Okamoto, Hideaki Kasai, Takafumi Morii, Masamitu Takahasi, Yasuhito Gotoh, Hideo Furuhashi, Ken-Ichi Tanaka, Hiroya Nakajima, Masahiko Yamamoto, Hiroshi Morikawa, Hiroshi Tsuji, Zenzaburo Kabeya, Katsutoshi Tanaka, Kenjiro Oura, Katsumi Nishimura, Masahiro Okuda, Won-Chul Moon, Tatsuo Wakaida, Toshio Yoshikawa, Hisao Nakashima, Hideaki Hoshino, Nagao Kamijo, Shigeki Hirobayashi, Kouji Noda, Akio Suzuki, Yoshio Suzuki, Masahide Gotoh, Yoshihiro Satoh, Yoshiyuki Mizuno, Kazuhiro Hashimoto, Yoshiyuki Uchida, Seiichi Goto, Nobuharu Ohsako, Toshio Yoshizawa
Publikováno v:
SHINKU. 38:765-836
Publikováno v:
Review of Scientific Instruments. 71:1157-1159
The production of organosilicon ions in a Freeman-type ion source were studied for SiC heteroepitaxial growth on a Si wafer. One of the possibilities for SiC epitaxy is a low energy deposition of an organosilicon ion beam. The advantage of this techn
Publikováno v:
Review of Scientific Instruments. 71:1168-1170
In order to investigate the fundamentals of the deposition of ions with energies in the range of 10–100 eV, we developed Freeman-type hybrid ion source and a low-energy mass-analyzed ion beam deposition system. Analyzing the energy distributions of