Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Kazuhiko Ishigo"'
Autor:
Masayoshi Kobayashi, Nobuo Hayasaka, Naoto Yoshitaka, Yoichi Ogawa, Tatsuhiko Higashiki, Shinichi Ito, Kenji Kawano, Kazuhiko Ishigo, Hideaki Kashiwagi, Hiroshi Ikegami
Publikováno v:
SPIE Proceedings.
We have successfully achieved accurate alignment to remove stacked TiN/Ti/Al/TiN/Ti films on damascene W marks by using laser ablation technology. Because, the Al films deposited on the damascene W marks lead to poor quality of alignment accuracy due
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::f4a716a137fe85375edb7fa91ea9d5fe
https://doi.org/10.1117/12.534907
https://doi.org/10.1117/12.534907
Autor:
Hiroshi Ikegami, Kazuhiko Ishigo, Ryo Tanaka, Masahiko Yasuda, Mitsuru Kobayashi, Tatsuhiko Higashiki, Nobutaka Magome
Publikováno v:
SPIE Proceedings.
Various alignment methods for a semiconductor exposure tool have been proposed and developed. Especially, the TTR (through the reticle) alignment technique has been expected as the ideal system since the direct measure between a reticle and a wafer t
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::1632689dcd55ba942bec6837fa7a1e14
https://doi.org/10.1117/12.544231
https://doi.org/10.1117/12.544231