Zobrazeno 1 - 4
of 4
pro vyhledávání: '"Kazufumi Hata"'
Publikováno v:
Plasma Chemistry and Plasma Processing. 41:757-777
In this paper $$\hbox {CH}_4$$ / $$\hbox {H}_2$$ gas flow rate effect on polycrystalline diamond deposition was studied using a time-series exposure technique of modulated induction thermal plasma (M-ITP) and non-modulated induction thermal plasma (N
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::1c85e48dceef2432d1278fc50633a3bd
https://doi.org/10.1007/s11090-021-10156-9
https://doi.org/10.1007/s11090-021-10156-9
Publikováno v:
Journal of Physics D: Applied Physics.
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::db6ecf733d4784d631146e3f8b090875
https://doi.org/10.1088/1361-6463/abe0df
https://doi.org/10.1088/1361-6463/abe0df
Autor:
Yoshihiko Uesugi, Kazufumi Hata, Takashi Arai, Yasunori Tanaka, Tatsuo Ishijima, Yusuke Nakano
Publikováno v:
Journal of Applied Physics. 126:223302
This paper investigates pressure influence on polycrystalline diamond formation using sawtooth-waveform modulated induction thermal plasma. Modulated induction thermal plasma was used to promote nucleation of diamond particles in the first stage. The
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::ade967104fe608c7eaf00ad518632a56
https://doi.org/10.1063/1.5124058
https://doi.org/10.1063/1.5124058
Publikováno v:
Rigakuryoho Kagaku. 27:421-425
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::900cbf7ef8a3410d09b9b137bfc7844b
https://doi.org/10.1589/rika.27.421
https://doi.org/10.1589/rika.27.421