Zobrazeno 1 - 3
of 3
pro vyhledávání: '"Kazimierz W. Wirpszo"'
Autor:
Emilio Panarella, Wen-Chieh Tang, Oleg G. Semyonov, Xiaoming Guo, Frank F. Wu, Kazimierz W. Wirpszo, Meisheng Xu, Chender Huang, L. Klibanov
Publikováno v:
SPIE Proceedings.
The VSX is essentially a miniature discharge capable of emitting soft X-ray radiation. Because the radiation is emitted in small dose in each spark, it is necessary to repeat the phenomenon at high frequency in order to achieve the industrial through
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::40dd1f6981abb369f87336e747e7fb80
https://doi.org/10.1117/12.390113
https://doi.org/10.1117/12.390113
Publikováno v:
SPIE Proceedings.
The technology of x-ray/EUV point plasma sources is competing with the multiple beam synchrotrons as radiation sources for submicron lithography. The company ALFT has been doing research and development on two plasma point sources for several years n
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::de8cb56f23d8d4808da4a6898f0fb5b8
https://doi.org/10.1117/12.351113
https://doi.org/10.1117/12.351113
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