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Publikováno v:
2012 SEMI Advanced Semiconductor Manufacturing Conference.
Putting robotic automation to work in a mid-nineties vintage 8” wafer fab is without a doubt a challenging maneuver. Therefore it is not at all surprising that any rigorous project scope puts all its momentum into getting the robots automatically m
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::17a7894658cebbc4d963ca75f6e41db9
https://doi.org/10.1109/asmc.2012.6212906
https://doi.org/10.1109/asmc.2012.6212906
