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Publikováno v:
Microelectronics Reliability. 64:656-659
We successfully applied high frequency scanning acoustic microscopy (SAM) as a tool for the analysis of MEMS sensors. Using state of the art transducers with frequencies up to 300 MHz, we evaluated the achievable resolution and performed case studies
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::d1fa545775dea09672ee1fed36f8da70
https://doi.org/10.1016/j.microrel.2016.07.108
https://doi.org/10.1016/j.microrel.2016.07.108
