Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Katy Ip"'
Autor:
Leo G. Svendsen, Katy Ip, Michael A. Fury, Harold O. Madsen, Paul J. Roman, Seigi Suh, Shyama P. Mukherjee
Publikováno v:
SPIE Proceedings.
Considerable difficulties and limitations are associated with the patterning of thick photoresist layers to generate high aspect ratio features in MEMS fabrication. Moreover, a large number of steps is needed to achieve the patterned MEMS structures.
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::0d900c670f9dbeabc9c961eec6354d2b
https://doi.org/10.1117/12.478292
https://doi.org/10.1117/12.478292
Autor:
Shyama P. Mukherjee, Aleta Jamora, Harold O. Madsen, Seigi Suh, Leo G. Svendsen, Michael A. Fury, Paul J. Roman, Katy Ip
Publikováno v:
MRS Proceedings. 769
PMOD (Photochemical Metal Organic Deposition)-based DTFI (Direct Thin Film Imaging) methodology is a demonstrated means for patterning organic materials on flexible (plastic) substrates. This process is used to pattern 1-micron features at an aspect
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::310defc36e09dfe016f41eec1eed9982
https://doi.org/10.1557/proc-769-h5.1
https://doi.org/10.1557/proc-769-h5.1