Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Katsuya Shitanaka"'
Publikováno v:
JOURNAL OF CHEMICAL ENGINEERING OF JAPAN. 41:779-784
Titanium oxide (TiO2) thin films were grown on Si(100) substrates using the chemical vapor deposition (CVD) of titanium tetra isopropoxide (TTIP; Ti(OCH(CH3)2)4). The distribution of the growth rate in the reactor and the step coverage of films grown
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::053247ad81c0007c2cd44553ddb73df0
https://doi.org/10.1252/jcej.07we118
https://doi.org/10.1252/jcej.07we118
Autor:
Katsuya Shitanaka, Young Sik Shin, Michihide Yoshida, Yasunobu Akiyama, Hiroshi Murakami, Nobuyuki Imaishi
Publikováno v:
Thin Solid Films. 515:4975-4979
Lithium niobate films grown epitaxially on sapphire substrate were prepared using a thermal chemical vapor deposition method from the metalorganic compounds Li(C 11 H 19 O 2 ) and Nb(OC 2 H 5 ) 5 . The range of operating conditions for obtaining pure
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::8c1353ca089d1db491cc6d356fe42340
https://doi.org/10.1016/j.tsf.2006.10.034
https://doi.org/10.1016/j.tsf.2006.10.034