Zobrazeno 1 - 10
of 48
pro vyhledávání: '"Katrien Strubbe"'
Publikováno v:
Education Sciences, Vol 14, Iss 4, p 425 (2024)
Teachers in secondary vocational education face challenges in interdisciplinary teaching due to their traditional teacher education within specific subject domains. Collaborative efforts—like those implemented in Teacher Design Teams (TDTs)—can p
Externí odkaz:
https://doaj.org/article/55aac756b7cf49c3b8724aa93cfad6ad
Publikováno v:
Journal of The Electrochemical Society. 163:D3053-D3061
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::decb4f9612852084fef2f4d51ab18b96
https://doi.org/10.1149/2.0081612jes
https://doi.org/10.1149/2.0081612jes
Publikováno v:
Electrochimica Acta. 127:315-326
The inhibition effect of different polyether suppressors on the nucleation and growth of copper during galvanostatic deposition was investigated as a function of deposition current density and suppression strength. An increase in the deposition curre
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::79d07720db5eda0c6d89312db6418614
https://doi.org/10.1016/j.electacta.2014.02.052
https://doi.org/10.1016/j.electacta.2014.02.052
Publikováno v:
Electrochimica Acta. 92:474-483
The electrochemical nucleation and growth of copper on a ruthenium–tantalum (RuTa) alloy from acid copper sulfate solutions has been studied. The mechanism of copper nucleation and growth during galvanostatic deposition was investigated as a functi
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::c6e0c5e0c7751dbf491d7b3e3e936677
https://doi.org/10.1016/j.electacta.2013.01.037
https://doi.org/10.1016/j.electacta.2013.01.037
Publikováno v:
Journal of The Electrochemical Society. 160:D60-D65
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::89c289f3cfe1e16678908432e049b7aa
https://doi.org/10.1149/2.050302jes
https://doi.org/10.1149/2.050302jes
Het is belangrijk om leerlingen vertrouwd te maken met het discours van een wetenschapsdomein en het grote belang van onderzoeksvaardigheden en probleemoplossend denken. Deze gids wil het abstracte concept ‘onderzoekscompetentie'omzetten naar prakt
Publikováno v:
ECS Transactions. 41:99-110
The effect of the molecular mass (Mm) of polyethylene glycol (PEG) and its derivatives on the copper island density (Np) on ruthenium-tantalum (RuTa) alloy was investigated by utilizing scanning electron microscopy (SEM) and galvanostatic methods. Th
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::1fb11626f73a50e25267316154ccaf03
https://doi.org/10.1149/1.3699384
https://doi.org/10.1149/1.3699384
Autor:
Philippe M. Vereecken, L. Carbonell, Rudy Caluwaerts, Zsolt Tokei, Katrien Strubbe, Tanya A. Atanasova
Publikováno v:
ECS Transactions. 41:83-97
The copper interconnect technology is constrained by the significant current distribution due to the terminal effect for resistive thin seeds. As a result, the current in the wafer center can become insufficient for cathodic protection of thin copper
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::50d1335113993a4ea344a1851cded504
https://doi.org/10.1149/1.3699383
https://doi.org/10.1149/1.3699383
Publikováno v:
ECS Transactions. 28:9-16
The electrochemical nucleation and growth of copper on a ruthenium-tantalum (RuTa) alloy has been studied using galvanostatic methods. The experimental results show that the island density is highly dependent on the bath composition and deposition pa
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::c72c7f18894b79636d8fcdda76953bab
https://doi.org/10.1149/1.3502439
https://doi.org/10.1149/1.3502439
Publikováno v:
ECS Transactions. 25:67-78
The acid copper sulfate solutions used for Damascene plating contain several additives which provide the differential kinetics inside cavities for void-free fill. Although the synergetic effects between these additives were studied quite thoroughly f
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::eeb326b6fc1dc5ff076ab009efb61c6c
https://doi.org/10.1149/1.3335493
https://doi.org/10.1149/1.3335493