Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Kathleen A. Feinberg"'
Autor:
James C. Diehl, Pinyen Lin, Kathleen A. Feinberg, Yao Rong Wang, Jingkuang Chen, Nancy Y. Jia, Jun Ma, Peter M. Gulvin, Kristine A. German, Larry Herko, John Meyers, Xueyuan Liu, Joel A. Kubby, Peter J. Nystrom
Publikováno v:
SPIE Proceedings.
Xerox Corporation has developed a technology platform for on-chip integration of latching MEMS optical waveguide switches and Planar Light Circuit (PLC) components using a Silicon On Insulator (SOI) based process. To illustrate the current state of t
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::2ebf8d0f82c8abca0a95c92c4d78f281
https://doi.org/10.1117/12.528996
https://doi.org/10.1117/12.528996
Autor:
Jun Ma, Joel A. Kubby, Jingkuang Chen, Peter M. Gulvin, Yao Rong Wang, Xueyuan Liu, James C. Diehl, Nancy Y. Jia, Kristine A. German, Larry Herko, John Meyers, Pinyen Lin, Kathleen A. Feinberg, Peter J. Nystrom
Publikováno v:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. 22:826
On-chip integration of optical switches and planar light circuits (PLCs) can greatly reduce the size, manufacturing cost, and operating cost of multicomponent optical systems. A silicon-on-insulator platform for integrating microelectromechanical sys
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::afb7de62cedaa9b198e713dc90a4fccf
https://doi.org/10.1116/1.1644111
https://doi.org/10.1116/1.1644111