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pro vyhledávání: '"Katherine V. Hawkins"'
Autor:
Roland Hahn, Katherine V. Hawkins, Oliver D. Patterson, Brian W. Messenger, Eric H. Beckmann, R. Takalkar, Xing J. Zhou
Publikováno v:
2010 IEEE/SEMI Advanced Semiconductor Manufacturing Conference (ASMC).
Embedded DRAM will play a much larger part in IBM server microprocessors for new SOI technologies. Etch of a deep trench (DT) into the substrate, which is used to form the capacitor, is a complicated multi-step process. One of the key elements is etc
Autor:
Stephen R. Fox, Oliver D. Patterson, K. Miller, J. Rice, Ishtiaq Ahsan, Katherine V. Hawkins, Xu Ouyang, Dallas Lea, D. Riggs, B. Ebersman
Publikováno v:
2007 IEEE/SEMI Advanced Semiconductor Manufacturing Conference (ASMC).
Yield learning during early technology development is critical to ensuring successful integration of new process technologies, meeting development schedules, and transitioning smoothly into manufacturing. However, yield learning in early technology d